本文應用比下壓能公式及兩道次偏移加工法，建立加工整合兩個切線奈米流道連結扇形圓弧奈米流道以及中間連結一個垂直直線奈米流道梯型凹槽到預定寬度及預定深度的模擬模式及公式。在切線連接扇形圓弧加工時，由於AFM機台只能進行微小直線段加工，故本文推導出曲線與微小線段的弦高誤差的計算公式，進而提出模擬計算出由多個微小線段連結而成的近似扇形圓弧的方法。
而在垂直段的部分，本文提出形狀堆疊觀念以及改變下壓力方法，在兩個扇形圓弧奈米流道中間堆疊上一個垂直直線奈米流道，推導出加工直線段奈米流道梯型凹槽到預定寬度及預定深度所需的各項加工參數的相關公式及模擬模式。本文的形狀堆疊觀念為將計算出的垂直直線奈米流道的第一切削道次和上方切線連結扇形圓弧奈米流道的第一切削道次與第二切削道次的偏移量相同，故垂直直線奈米流道的第一切削道次的偏移量會跟切線連結扇形圓弧奈米流道第一切削道次以及第二切削道次間的偏移量Pn相同。因為垂直直線奈米流道的各切削道次進行偏移量加工時，垂直直線奈米流道的前三個切削道次以及後面六個切削道次在移除垂直直線奈米流道的體積時，有跟扇形圓弧中間部分已切削到預定深度的移除體積相交，所以我們需要在每當偏移一個偏移量Pn的切削道次時，就需要改變一次下壓力，且經模擬後，垂直直線奈米流道只需要一個切削層便可達到預定深度。
本文也提出應用較小下壓力可去除垂直直線奈米流道的微小凸起側邊的方法。其為沿著垂直直線奈米流道的各加工長度的起始點和終點所連接線段進行垂直直線的加工，其微小下壓力會造成垂直直線奈米流道的垂直線的側邊深度略微增加側邊，但此微小下壓力的大小要控制使增加的深度小於0.54nm，則可使微小的凸起側邊消除變成垂直直線的側邊。本文也提出針對整合兩個切線奈米流道連結扇形圓弧奈米流道以及中間連結一個垂直直線奈米流道進行AFM量測實驗時的量測斷面方法及所需的直線方程式。
最後並量測AFM實驗加工所得之結果，將量測結果和模擬結果相比較;驗證本文所提出整合兩個切線奈米流道連結扇形圓弧奈米流道以及中間連結一個垂直直線奈米流道到預定寬度及預定深度的模擬模式和公式及AFM實驗加工方法為合理可接受的。

The work applies the specific downward force energy (SDFE) equation and two-pass offset machining method to establish a simulation model for machining of integrated two tangent nanochannels and fan-shaped arc nanochannels connecting with a vertical straight-line nanochannel trapezium groove for industrial applications. During the tangent segment is connecting with the fan-shaped arc in machining, the atomic force microscopy (AFM) machine was performed to break the cutting counter into tiny straight-line segments. Based on this cutting strategy, the derived analytical equation can eliminate chord height errors, between the curves and tiny line segments. Furthermore, a simulation method was proposed for the lease errors on the connected multiple tiny line segments, compared to the initial profile of the near-fan-shaped arc. When resolving the vertical line segments with the lease errors, a shape stacking concept and a method of changing the downward force were proposed. In this concept, the vertical straight-line nanochannel would be superimposed on the middle of two fan-shaped arc nanochannels whereby a straight-line nanochannel trapezium groove, the expected width and depth were derived via analytical equations and simulation model for the required machining parameters.
The superposition of the shape stacking concept was developed to have the same offset amount between the first cutting pass of each calculated vertical straight-line nanochannel and the 2nd cutting pass of the upper tangent segment connecting with the fan-shaped arc nanochannels. Since the offset amount of the vertical straight-line nanochannel at the 1st cutting pass was the same as the offset amount Pn of the upper tangent segment in connecting with the fan-shaped arc nanochannels, the total deviation of the amplitude in the resultant vector would be constant. By offsetting the amount in machining of the vertical straight-line nanochannel in each cutting pass, the certain volumes would be removed with the certain depth at the central part of the fan-shaped arc. As a result the downward force needed to reset according to the offset amount Pn in order to maintain the exact cutting depth and width. After simulation, the vertical straight-line nanochannel would be machined up to the expected depth in each machining layer via each cutting pass only.
This study also proposed the method of applying a minute downward force to remove the slightly raised edge from the vertical straight-line nanochannel. This method was to conduct the machining of vertical straight-line segments in the line segments which connected with the starting points and ending points in different machining lengths along the vertical straight-line nanochannel. The applied tiny downward force would slightly increase with the depth of the vertical line’s edge in the vertical straight-line nanochannel by up to 0.54nm. In such a case, the slightly raised edge would be removed and replaced by a vertical straight-line edge. Also, experiments of the cross-section measurement and the required straight line equation in the AFM measurement were developed and reported.
Finally, the measurement results in AFM experimental machining with the simulation results were obtained and proven. The simulation models and equations for the integration of tangent nanochannels connecting with fan-shaped arc nanochannels and a vertical straight-line nanochannels under the expected depth were established.

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