探針在物體表面上掃描量測所得影像會受探針本形狀而對待測
物輪廓影像具擴張(Dilation)現象，本研究為針對微米及奈米表面粗糙
度下重建探針輪廓，並藉著實際量測與模擬後探針掃描影像做比較。
探針輪廓重建方式乃從影像褶積式(Image convolution)中發展出來，
此探針重建方式簡稱為STRM (Stylus Tip Reconstruction Method)，分
別比較於微米表面粗糙度下之國際規範ISO 3274 建議之量測刮鬍刀
片和奈米表面粗糙度等級下美國國家標準與技術研究院(NIST)所提
出之Blind reconstruction ， 微米表面粗糙度實驗使用
HOMMELWERKE T4000 與Veeco Dektak 200 兩接觸式探針量測機
台，奈米表面粗糙度實驗使用AFM (Atomic Force Microscopy)，Blind
reconstruction 藉掃瞄式影像處理商用軟體SPIP(Scanning Probe Image
Processor)輔助運算。在微米尺度粗糙度實驗中，重建探針方法STRM
可檢測出探針上之毀損部分，而在奈米尺度粗糙度儀實驗中，本研究
發展出之STRM 所得結果與商用軟體SPIP 估算結果相近，且在微米
尺度下之實際量測結果與模擬影像比對實驗中，以平均表面粗糙度
Ra 進行量化後比較發現，本研究發展STRM 所計算結果也與國際
標準規範ISO 3274 所建議之量測刮鬍刀片方法計算結果相近，同
時STRM 可用來估算探針毀損對量測結果(Ra)之影響。未來可繼續
朝三維探針輪廓重建邁進，提升奈米粗糙度量測之可靠性，期能作為
奈米粗度發展所需標準之依據。

Contact stylus instrument have difficulties to be traced in nano
surface roughness measurement due to the dilation of measured profile
image by the nano-scale stylus tips. This research is to develop a stylus
tip reconstruction method (STRM) which is derived from image
convolution of micro and nano surface roughness measurement and to
compare the effects of tip profiles based on tracing razor blade of ISO
3274 and blind reconstruction in draft standard of National Institute of
Standards and Technology (NIST, USA) with micro and nano scale
standard gages by experiments respectively. Experimental set-up is
configured of a surface roughness analyzer, HOMMELWERKE T4000
and a step height analyzer, Veeco Dektak 200 for micro surface roughness
and an automatic force microscope, ULTRAObjective for nano surface
roughness measurement to verify the developed STRM. Experimental
results show that the tip reconstruction with STRM are close to results
obtained by measuring a razor blade based on ISO 3274 in micro surface
roughness and also to results obtained by blind reconstruction of stylus
tips suggested by NIST draft standard in nano surface roughness
measurement. With the developed STRM, evaluation of average surface
roughness Ra has been compared with results calculated by a commercial
software SPIP (Scanning Probe Image Processor). Moreover, the STRM
can be used to evaluate the effects of tip wear on measurement results.
Future works focus on developing 3D STRM in study of nano surface
roughness.

【1】 Vorburger, T. V., J. Raja, "Surface Finish Metrology Tutorial, "
NISTIR 89–4088 (National Institute of Standards and
Technology, Gaithersburg, MD), June, 1990.
【2】 Koutsos, Vasileios., "Physical properties of grafted polymer
monolayers studied by scanning force microscopy :
morphology, friction, " elasticity, pp. 6-17, 1997.
【3】 Digital Instruments, "Scanning probe microscopy training
notebook," DI training notebook, 1998.
【4】 Iinternational Organization for Standarization, "Geometrical
Product Specifications (GPS) -- Surface texture: Profile
method；Measurement standards -- Part 1：Material measures,"
ISO 5436-1, 2000.
【5】 Iinternational Organization for Standarization, "Geometrical
Product Specifications (GPS) -- Surface texture: Profile
method – Nominal characteristics of contact （ stylus ）
instruments," ISO 3274-1, 1996.
【6】 American Society for Testing and Materials, "Standard Practice
for Measuring and Reporting Probe Tip Shape in Scanning
Probe Microscopy,” E1813-96, 1996.
【7】 International Organization for Standardization, "Geometrical
Product Specifications (GPS) -- Surface texture: Profile
method – Rules and procedures for the assessment of surface
texture," ISO 4288, 1996.
【8】 International Organization for Standardization, "Geometrical
Product Specifications (GPS) -- Surface texture: Profile
method –Metrological characteristics of phase correct filter, "
ISO 11562, 1996
【9】 International Organization for Standardization, "Geometrical
Product Specifications (GPS) -- Surface texture: Profile
method – Terms definitions and surface texture parameters, "
ISO 4287, 1997
【10】 Villarubia, J.S., "Morphological estimation of tip geometry for
scanned probe microscopy," Surface Science, 321 , pp. 287–300,
1994.
【11】 Villarubia, J.S., "Algorithms for Scanned Probe Microscope
Image Simulation, Surface reconstruction, and tip Estimation,"
J. Res. of the NIST, 102(4), pp. 425–454, July–Aug., 1997.
【12】 Bukharaev, A.A., N.V. Berdunov, D.V. Ovchinnikov, K.M.
Salikhov, "Three-dimensional probe and surface reconstruction
for atomic force microscopy using deconvolution algorithm,"
Scanning microscopy, Vol. 12, No. 1, 1998.
【13】 Dongmo, L.S., J.S. Villarrubia, S.N. Jones, T.B. Renegar, M.T.
Postek, J.F. Song, "Experiment test of blind tip reconstruction
for scanning probe microscopy," Ultramicroscopy, 85, 2000.
【14】 HÄubner, U., W. Morgenroth, H.G. Meyer, Th. Sulzbach, B.
Brendel, W. Mirande, "Determination of AFM tip-shape with
well known sharp edged calibration structures: actual state and
measuring results," 2001.
【15】 Xu, Song, A. Nabil, Gang Yu. Liu, "Characterization of AFM
tip using nanograting ," American vacuum society, pp. 175-176,
2001.
【16】 Leung, Edward C. W., Peter Markiewicz, M. Cynthia Goha,
"Identification and visualization of questionable regions in
atomic force microscope images, " American vacuum society,
15(2), Mar/Apr, 1997.
【17】 PTB, "Uncertainty analysis of roughness measurement,"
Germany, 2000.
【18】 Sedin, Dana L., Kathy L. Rowlen, "Influence of tip size on
AFM roughness measurements," Applied Surface Science, pp.
40–48, 182, 2001.
【19】 Chen, Yuhang, Wenchao Huang, "Numerical simulation of the
geometrical factors affecting surface roughness measurement by
AFM," Measurement science and technology, August. 2004.
【20】 卓君翰、陳炤彰、劉惠中、陳彥良、陳智榮, "接觸式探針表
面粗度儀之量測不確定度分析，" 中國機械工程學會第二十
一屆學術研討會論文集，pp. 4129-4134,Nov. 26th - 27th 2004.
【21】 Chen, Chao-Chang A., Chun-Han Cho, Huay-Chung Liou,
Yen-Liang Chen, Chiung-Wu Lee, Shah-Rong Lee, "Analysis of
Stylus Tip Geometry with Contact Stylus Instrument," Journal
of the Chinese Society of Mechanical Engineers, Vol. 25, NO 5,
pp 423-429, 2004.
【22】 Chen, Chao-Chang A., Jr-Rung Chen, Huay-Chung Liou,
Yen-Liang Chen, "Size Effects on Stylus Tip Reconstruction for
Micro and Nano Roughness Measurement," to be presented in
the SPIE 50th Annual Meeting, San Diego Convention Center,
Augues, 2005.
【23】 Allen, R. Stubberud, H. Hostetter Gene, "Digital Control
System Design, " 2e Mohammed S. Santina, Prentice-Hall,
1994.
【24】 Lin, Wei-Cheng, "Mathematical Morphology and Its
Applications on Image Segmentation, " National Taiwan
University, pp. 8-20, 2000.
【25】 Duffie, Neil A, John G. Bollinger, "Computer Control of
Machines and Processes, " Addison Welsly, 1986.
【26】 Nanosensor, http://www.nanosensors.com.
【27】 Image Metrology, http://www.imagemet.com.