為了解決市面上微波探針脆弱易斷的問題，且必須購買對應pitch的SOLT校正板使量測成本相當昂貴，本研究嘗試提出一種配合pogo pin的1 mm pitch G-S-G彈簧探針，其擁有強壯與耐久的接腳，在操作上更加便捷。而配合自製SOLT校正板，並以FR4板測試0-10 GHz的使用頻寬，成功達到一定程度的校正能力，校正後介入損失S21在±1.2 dB間，而反射損失S11小於-20 dB。了解網路分析儀內部設定，自行針對自製的治具來定義客製化的SOLT校正套件。SOLT標準中的電容及電感透過CST Microwave Studio分析、網路分析儀的求解與微波探針的實測三種方式來求值，再透過時域反射儀量測延遲時間與損耗。比較介入損失部份，曲線走勢主要由延遲時間與損耗決定。而補償正確的電容電感值可減低振幅抑制振盪的情形。對於反射損失來說，電容與電感補償值可以有效改善反射。自製彈簧探針不同電容電感值的差異在量測待測物時，1~5 GHz前S21皆可與微波探針相近，5 GHz後則需要更精準的電容電感值來控制。實測補償值的曲線在5 GHz前量測效果與市售探針相近。以自製校正板來校正微波探針作驗證，證明使用50歐姆阻抗探針後，校正結果與市售校正板於10 GHz頻寬內也相近，介入損失S21可在±0.02 dB間，反射損失S11小於-50 dB。

For high-frequency measurement, the RF probe is weak due to its tiny pins. In addition, it is necessary to purchase the expensive SOLT calibration substrate. To reduce the high cost, the study developed a ground-signal-ground microwave probe of 1 mm pitch with pogo pins. Because the pins are stronger so as to increase measurement efficiency without damaging the pins. Furthermore, we designed an SOLT calibration substrate made of FR4 for this probe. The insertion loss of a trace on the PCB was measured by the probe to be within ±1.2 dB and return loss less than
-20 dB within 0 to 10 GHz after calibration. Those parameters needed for the probe were obtained by using CST microwave studio, VNA, TDR. The correct compensation of capacitance and inductance could suppress measurement ripples. For return loss, the correct value of capacitance and inductance can improve the trend of curve effectively. The discrepancy of capacitance and inductance did not influence the insertion loss below 5 GHz. The more accurate the compensated values are, the more stable the higher frequency measurement results are. The results of measurement were even similar to RF probe upon 8 GHz by using the correct valve, which was directly measured from the Open and Short model on substrate. This designed SOLT substrate with correct parameters made the calibration results of RF probe successfully similar to CS-10 calibration substrate below 10 GHz.

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