研究生: |
張仁豪 Ren-Hao Zhang |
---|---|
論文名稱: |
利用多次翻模及模具設計開發高密度微透鏡陣列 Manufacturing And Characterization of Highly-Densed Microlens Array by Mold Design And Multiple Casting Technique |
指導教授: |
陳品銓
Pin-Chuan Chen |
口試委員: |
田維欣
Wei-Hsin Tien 曹嘉文 Chia-Wen Tsao 莊賀喬 Ho-Chiao Chuang |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2018 |
畢業學年度: | 106 |
語文別: | 中文 |
論文頁數: | 142 |
中文關鍵詞: | 微透鏡陣列 、可調式微透鏡晶片 、微流晶體片 、二次翻模 、微銑削加工 |
外文關鍵詞: | microlens array, tunable microlens chip, microfluidic chip, double casting, micro-milling |
相關次數: | 點閱:392 下載:16 |
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本研究目的是製作出一可利用模具設計控制膜厚之高密度微透鏡陣列,且利用微流道晶片製程以微銑削加工和翻模技術製作可調式微薄膜晶片,將此晶片做為生產微透鏡陣列之工具。
製作方式是以微銑削製作PMMA模具且利用二次澆鑄翻模成一體成形的高密度PDMS結構,再利用此PDMS透鏡結構與與基板以lPDMS(未固化PDMS)黏合,做出一個可由液體加壓之可調式微透鏡晶片,再利用UV光固化膠翻模,製造一個凹面半球形微透鏡陣列模仁,將此UV膠模仁作為翻模之模具,最後完成球面狀的PDMS微透鏡陣列。
本實驗製程解決的問題有:(1)同質材料(PDMS)的脫模技術;(2)透過模具設計以及lPDMS黏合PMMA模具克服先前PDMS測漏問題,精準控制PDMS微透鏡薄膜厚度;(3)以lPDMS黏合技術取代氧電漿黏合技術,增加黏合強度。
本實驗設計了以下實驗進行測試:(1)PDMS微透鏡薄膜厚度量測,測試是否有效解決PDMS測漏問題;(2)PDMS微透鏡陣列密度改良,以填充因子(Fill Factor)來檢測高密度微透鏡陣列;(3)PDMS微透鏡陣列之高度均勻度量測。
The major goal of this research is to fabricate a high fill factor micro-lens array which the membrane thickness controlled by mold designing. In this study, we use micro-milling and duplicated molding technique to integrate multilayers and tunable micro-lens array into a microfluidic chip for further applications.
PDMS was poured and filled into the PMMA mold fabricated by micromilling to creat a high fill factor micro-lens chip. A complete tunable liquid-filled microlens chip was realized after the bonding of PDMS/Glass by lPDMS (uncured PDMS) method. Then, an UV glue curing was utilized to make an array of concave hemispherical micro lens which use as another mold-insert for the replication of spherical PDMS microlens array as the final result.
Herein, we develop some techniques to solve problems related to: (1) The demolding of homogeneous material (PDMS) with the assistance of coating spray; (2) The leakage of PDMS caused by the spacing between PMMA mold-inserts by mold designing combined with lPDMS bonding to control the membrane thickness; (3) Utilizing lPDMS bonding instead of o×ygen plasma to increase the bonding strength.
Several e×periments were carried out to verify the quality of the high fill factor microlens arrays: (1) The measurement of PDMS membrane thickness to test if whether the leakage problem was solved; (2) The calculation of the fill factor of microlens array and compare with previous study; (3) The uniformity of microlens array through the same sag heights
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