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研究生: 章立佑
Li-yo Chang
論文名稱: 反射式微結構之平面聚焦特性分析與探討
Study of focusing properties of reflective micro perodic structures
指導教授: 柯正浩
Cheng-Hao Ko
口試委員: 蘇順豐
Shun-Feng Su
施君興
Chun-Hsing Shih
學位類別: 碩士
Master
系所名稱: 工程學院 - 自動化及控制研究所
Graduate Institute of Automation and Control
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 136
中文關鍵詞: 光柵最小平方法Nelder-Mead單體法
外文關鍵詞: grating, least square method, Nelder-Mead simple method
相關次數: 點閱:392下載:1
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本研究主要探討微型凹面光柵的曲面計算,及縮小尺寸的光學特性。並針對入、出射臂長的改變,造成光柵像差的解析度、焦點位置及聚焦縱深的範圍變化做為研究目的。
在設計方面,使用matlab軟體優化光柵的像差函數,使光柵像差所造成的解析度降低,其中優化方法包含最小平方法及Nelder-Mead單體法,利用優化後之參數求得微型光柵的曲面及間距。而本光柵除了設計於子午(meridional)之非球面聚焦功能外,尚未包含緯線弧矢(sagittal focus)能力。
使用計算出的微型光柵在光學軟體Tracepro上建立光柵模型,進行模擬其光學特性,由偵測器上所接收到的強度分佈數據來計算各優化結果的解析度和聚焦縱深,並尋找解析度最佳值及觀察各別聚焦縱深的範圍和是否能擺入線性偵測器。


This study investigates the curvature of micro-concave grating , and the optical properties by reducing the grating’s size. Our purpose is the variation of the aberration’s resolution , the focus point and the depth of focus by the decreasing the incident length and the exiting length. Optimize the function of aberration by Matlab, which the optimizing methods includes Least Squares and Nelder-Mead method. The obtaining the micro-grating surface and the spacing by the optimized parameters. The optical element provides meridional aspheric focusing for abnormal incident light beam.
Analyze the resolutions and the depth of focus by simulating data. Compare those resolutions to find the best result. Whether observing the depth of focus can post the linear detector.

第一章 導論1 1-1前言1 1-2研究目的3 1-3論文架構3 第二章 光柵相關原理 5 2-1光柵種類5 2-2光柵方程式7 2-3光柵的性能8 2-3-1色散8 2-3-1-1角色散8 2-3-1-2線色散9 2-3-2解析能力(Resolving Power)9 2-4凹面反射式光柵特性及原理11 2-5光程函數(Optical Path Function)16 2-6聚焦縱深(Depth of Focus)21 2-7閃耀式光柵(Blazed Grating)21 第三章 解析度分析24 3-1無像差系統24 3-2光柵的像差29 3-3總解析度30 第四章 優化方法及設計流程32 4-1優化目標32 4-2研究方法33 4-2-1最小平方法33 4-2-2Nelder-Mead單體法34 4-3設計流程35 第五章 模擬結果及分析40 5-1光學軟體TracePro40 5-2參數設定40 5-3半高全寬(Full Width at Half Maximum)42 5-4模擬結果43 5-4-1情形1 (r1,r2)=(20mm,30mm)44 5-4-2情形2 (r1,r2)=(15mm,20mm)72 5.4.3情形3 (r1,r2)=(10mm,15mm)91 5.4.4情形4 (r1,r2)=(5mm,10mm)110 5.4.5情形5 (r1,r2)=(5mm,5mm)120 5.5總解析度130 第六章 結論及未來展望133 6-1結論133 6-2未來展望134 參考文獻135

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