研究生: |
陳偉訓 Wei-Xun Chen |
---|---|
論文名稱: |
利用矽光子技術實現光學天線陣列 Realization of Optical Antenna Arrays with Silicon Photonics Technology |
指導教授: |
李三良
San-Liang Lee |
口試委員: |
李三良
San-Liang Lee 徐世祥 Shih-Hsiang Hsu 洪勇智 Yung-Jr Hung 宋峻宇 Jiun-Yu Sung |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 電子工程系 Department of Electronic and Computer Engineering |
論文出版年: | 2020 |
畢業學年度: | 108 |
語文別: | 中文 |
論文頁數: | 142 |
中文關鍵詞: | 光電積體電路 、矽光子 、光學雷達 、光學天線陣列 |
外文關鍵詞: | Silicon Photonics, Optical Antenna Arrays |
相關次數: | 點閱:530 下載:0 |
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近年來隨著自駕車的發展,對於感測元件的需求與研究日益增加,利用矽光子技術實現全固態式光學雷達同時具備矽光子積體電路低功耗、可積體化的特性及全固態式光學雷達高解析度、掃瞄範圍大的優點,因此,在感測領域扮演關鍵的技術。
本論文設計週期性側壁光柵結構波導作為光學天線,利用比利時微電子研究中心所提供之矽光子製程成功實現64通道光學相控陣列。經過量測與分析,驗證週期性側壁光柵結構波導作為光學天線的可行性,其光學天線傳播方向的光束發散角為0.15°,中心波長1550 nm之光束角度為0.43°,波長調控效率為每奈米0.16°,而光學天線陣列在陣列方向的光束發散角為0.135°,旁瓣角度約為9.66°,以上量測結果與模擬結果相符,但光學天線均勻出光的量測結果與模擬有所差異,其原因為製程誤差導致光柵形狀改變影響出光率。
此外,本論文重新設計光學相控陣列之架構,利用光切換器實現1024通道分組切換之光學相控陣列,不僅解決製程密度規範限制光學天線間距的問題,同時增加波長掃描範圍,並成功下線此設計。
In recent years, the demands of optical sensing devices and the research on the related technologies are fast increasing for developing autonomous vehicles. Implementation of solid-state light detection and ranging (LIDAR) with silicon photonics technology has the advantages of low power consumption, high-density integration, high resolution, and large beam-steering range. Therefore, solid-state LIDARs becomes the key technology in the field of optical sensing.
This thesis aims to design a periodic sidewall grating structure waveguide as an optical antenna for developing a LIDAR chip and implement a 64-channel optical phased array (OPA) on the silicon-on-insulator (SOI) platform by using the multi-project-wafer (MPW) service provided by IMEC. After measurement and performance analysis, the feasibility of using the periodic sidewall grating structure waveguide as an optical antenna is verified. The divergent angle of the optical antenna is 0.15 degrees along the longitudinal direction, the beam angle is 0.43 degree at the center wavelength of 1550 nm, the wavelength-tuning steering efficiency is 0.16 degrees per 1 nm of wavelength shift, the divergent angle of the optical antenna array is 0.135 degrees along the horizontal direction, and the side lobe angle of the optical antenna array is about 9.66 degrees. The above measurement results are consistent with the simulation results. However, the measured light emission pattern for the optical antenna is different from the simulation. The major cause is from the fabrication error that changes the shape of the grating and affect the light emission rate.
In addition, we redesigned the architecture of an OPA by using optical switches to realize a 1024-channel switched OPA which can not only overcome the limitation set by the design rules of the MPW service on the minimal pitch that can be used between the optical antennas, but also increase the steering range of wavelength-tuning on the longitudinal direction. The new design was successfully taped out to IMEC for manufacturing.
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