研究生: |
裴紹凱 Shao-kai Pei |
---|---|
論文名稱: |
二氧化銥奈米桿在還原後之表面現象分析及氣體感測性質之研究 Effect of reduction iridium dioxide nanostructure for surface analysis and gas sensing properties |
指導教授: |
劉進興
Chin-Hsin J. Liu |
口試委員: |
蔡大翔
Dah-Shyang Tsai 施正雄 Shih, Jeng-Shong 江志強 Jyh-Chiang Jiang |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 化學工程系 Department of Chemical Engineering |
論文出版年: | 2007 |
畢業學年度: | 95 |
語文別: | 中文 |
論文頁數: | 113 |
中文關鍵詞: | 二氧化銥 、QCM 、氣體感測 |
外文關鍵詞: | IrO2, QCM, Gas sensor |
相關次數: | 點閱:352 下載:1 |
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本論文主要利用化學氣相沉積(MOCVD)方式,在鍍於石英晶片上之金電極表面沉積二氧化銥,以此製作QCM質量式感測器,針對酸類及胺類氣體進行感測,發現有不錯的感測靈敏度,其偵測濃度可達數個ppm。
當我們將IrO2置於高真空環境下,以不同還原溫度(450 oC~600 oC)及還原時間(30分鐘~90分鐘),可使IrO2 部份去氧還原,利用XRD、XPS、拉曼光譜、SEM進行還原前後的表面分析。並結合模擬計算探討其吸附與脫附機制。
由XPS分析來看,二氧化銥還原前表面組成為IrO2 / IrO3 / Ir(OH)x,感測1000ppm丙酸所得訊號為160Hz、可逆性73%;在450 oC進行還原,表面組成不變,丙酸訊號仍為160Hz,但可逆性為88%;還原溫度提高至550 oC,則表面還原成Ir/IrO2,丙酸訊號提高為270Hz,可逆性達98%。即其靈敏度比還原高,且可逆性更佳。
當還原溫度再提高至600 oC時,丙酸訊號提高至320Hz,但可逆性降低至32%。為了改善可逆程度,我們預先在金電極上濺鍍ㄧ層Ti薄膜,並在相同的熱還原處裡條件下將IrO2脫氧,發現可逆性可大幅提升至80%。
Nanostructured IrO2 crystals are grown on a gold-coated quartz substrate by metal organic chemical vapor deposition (MOCVD). The resultant quartz crystal microbalance (QCM) sensor shows a good gas sensitivity towards carboxylic acid and amine vapors at the ppm level.
When the oxide is heated at 450oC~600oC in high vacuum, the IrO2 is partially reduced by thermal decomposition. The composition and the morphology of the sample surface before and after reduction are investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and scanning electron microscopy (SEM). Molecular simulation is also used to explain the mechanism of adsorption and desorption.
From XPS analysis, we find that the sample surface composition is IrO2/IrO3/Ir(OH)x before reduction. Upon exposure to 1000 ppm of propanic acid vapors, the QCM frequency shift is found to be 160 Hz with 73% reversibility when desorbed; After a reduction at 450oC, the surface composition and the QCM frequency shift remain the same, while the reversibility becomes 88%; When the reduction is carried out at 550 oC, the surface is reduced to become Ir/IrO2, and the Ir/IrO2 sensor shows a higher gas sensitivity (~270 Hz) and better reversibility (~98%) as compared to the IrO2/IrO3/Ir(OH)x sensor.
When reduction temperature is further increased to 600oC, the sensor shows an even higher sensitivity (~320Hz) but lower reversibility (~32%). However, if a thin Ti layer onto the Au electrode before growing the IrO2 crystals, followed by the 600oC reduction treatment, then the reversibility of the sensor can be improved to about 80%.
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