本論文主要探討飛秒雷射(Ultrashort-pulsed laser)於經過聲光偏轉器(Acousto-optic deflector)進行微加工(Micromachining)時所產生之角度色散(Angular dispersion)問題。飛秒雷射相較於長脈衝雷射，其採用超快脈衝來剝離(Ablation)材料，於材料上之熱量尚未累積時即已造成剝離，因此被稱為冷加工，有著熱影響區極小、無重鑄層及加工尺寸小等優點，但因為飛秒雷射屬於寬頻譜光源(Broadband light source)，不同頻率的光有著不同的行進速度，其經過聲光偏轉器時會產生不同之偏轉角度，故有角度色散之問題，本論文提出一理論模型加以描述角度色散之產生，並於數值研究方面，利用傅立葉級數(Fourier series)描述飛秒雷射之表示式，並採用布拉格法則(Bragg regime)計算角度色散值之多寡，最後由本論文所提出之角度色散補償方式補償色散之角度。

The purpose of this research is to discuss the angular dispersion problem of the ultrashort-pulsed laser in micromachining. In comparison with the long-pulse laser, the ultrashort-pulsed laser (pulse duration 150 fs, wavelength 800nm) has a better application in ablation for polymers, glasses and metal materials with its negligible heat-affected zone, no recasting, and the high machining precision. However, its broadband optical spectrum results in the problem of deflection angles of light when the ultrashort-pulsed laser passes through the acousto-optic deflector, which leads to the angular dispersion. In order to find a method to compensate for the angular dispersion, we formulated the phenomenon. By using the Fourier series technique, the short time light pulse can be decomposed into a combination of a series of time harmonic signals. And by applying the acousto-optic Bragg interaction principle, each harmonic of light can interact a corresponding sound wave. The quantitative description of the compensation of the angular dispersion is hence derived.

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