此篇博士論文首次介紹一種氧化鋅奈米線(ZnO-NWs)及金屬奈米管陣列(MeNTA)的複合結構，其中大量的氧化鋅奈米線呈現高度密集橫向及垂直的整齊排列。異質表面的金屬奈米管陣列是由濺鍍沉積不同金屬玻璃(Zr55Cu30Al10Ni5,Cu47Zr42Al7Ti4, Pd72Cu12Si16, W50Ni25B25,及Ni54B0.3Si36Cr2.7Fe7)於高度650nm、直徑2、10、20µm孔洞陣列之光阻劑上。接著於金屬奈米管陣列上濺鍍一層氧化鋅晶種層，提供奈米線於金屬奈米管陣列內成核的位置。分別使用掃描式電子顯微鏡、X光繞射儀、拉曼光譜儀、X光光電子能譜儀及光激發螢光譜儀分析此結構的表面型態、晶體結構、鍵結結構、表面組成分析以及光學性質。本篇結果顯示，奈米線呈現六角纖鋅礦結構，且有強烈UV光激發性。因此，可以應用在光電產業、感測器、奈米壓電發電機、太陽能電池及其他電池應用。
多數奈米材料，例如氧化奈米管、金屬或奈米碳管，由電沉積、蝕刻及光學顯影技術製成，受限於大小及覆蓋面積且不易控制其直徑、高度及管內空間，且難以形成整齊、週期性排列的結構。此篇研究的第二部分介紹一種得以控制直徑、高度及管內空間的氧化奈米管的製造方式。利用濺鍍技術於矽基材上沉積出整齊排列，管高650nm、直徑1.5 µm的ZnO, CuO, ZnO/CuO, Ti/ZnO奈米管陣列。其所有材料的表面形貌及ZnO、CuO的晶體結構，分別是使用場發掃描式電子顯微鏡(SEM)及X光繞射儀(XRD)進行觀察。

This Ph.D. thesis presents the first-ever nanohybrid ZnO nanowires (ZnO-NWs)/Metallic Nanotube Arrays (MeNTA) structure for the large-scale fabrication of highly dense laterally and vertically aligned ZnO-NWs. The preparation of the heterogeneous surface MeNTA was done by sputter-deposition of different metallic glasses (Zr55Cu30Al10Ni5, Cu47Zr42Al7Ti4, Pd72Cu12Si16, W50Ni25B25, and Ni54B0.3Si36Cr2.7Fe7) over contact-hole arrays created by a photoresist template with a height of 650 nm and various diameters (2, 10, and 20 µm). A ZnO seed layer is deposited by sputtering on MeNTAs to provide the nucleation sites to grow the nanowires inside the MeNTAs. The material analysis like surface morphology, crystal structure, bonding structure, surface functional composition of samples, optical properties was done using scanning electron microscopy, X-ray diffraction, Raman, XPS, and photoluminescence, respectively. Our results confirm that the nanowires show a hexagonal wurtzite structure and present strong UV emissions and thus, can be used in optoelectronics, sensors, piezoelectric-nanogenerator, solar cells, and battery applications.
`Most nanotube materials, such as oxide nanotube, metal, and carbon nanotube, are typically produced by electrodeposition, etching, and lithography methods on a limited scale and coverage area. it is not easy to monitor the diameter, height, and inter-tube spacing of these nanotubes, they were also grown with a lack of periodicity and order. In the second part of this study, a technique has been developed to fabricate ordered arrays of oxide nanotubes with control of the diameter, height, and intertube space. The Ordered ZnO, CuO, ZnO/CuO, Ti/ZnO nanotube arrays with a height of 650 nm and a diameter of 1.5 µm were fabricated on silicon substrates by sputter deposition techniques. The morphology and elemental composition of all the materials were characterized by scanning electron microscopy (SEM) and the crystal structure of ZnO and CuO were characterized by X-ray diffraction (XRD).

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