本研究使用射頻磁控濺鍍設備(RF Magnetron Sputtering)，並分為純氬氣與通入6.2 sccm與12.5 sccm氧氣氣氛，搭配CeO2靶材以功率100 W沉積氧化鈰薄膜於矽晶片、304不銹鋼塊材表面與304不銹鋼網上。首先進行薄膜材料性質的研究，以多功能高功率X光繞射儀(XRD)進行膜層結晶結構分析；場發射掃描式電子顯微鏡(FE-SEM)觀察表面形貌與橫截面；原子力顯微鏡(Atomic Force Microscope)分析表面立體形貌與粗糙度；奈米壓痕機械性質分析儀(Nanoindenter)量測表面硬度；透過刮痕試驗(Scratch Test)以觀察其薄膜剝落之臨界荷重(Lc)數值，評估薄膜與被鍍材料間的結合能力；最後進行應用方面之測試，利用水接觸角量測儀(Water Contact Angle)測得薄膜的疏水親油性能及表面能，最後將原材與鍍膜後之濾網放置於過濾設備中，進行不同油類與海水的油水分離測試，驗證氧化鈰薄膜有效分離油與水性質。
實驗結果顯示在低氧分壓下呈現氧化不完全的Ce4O7，在製程中通入氧氣可使氧化鈰氧化更完全接近CeO2；於表面與立體形貌觀察，在進行鍍膜時，如果氧氣流量增加，氧化鈰靶材內的氧離子解離會使靶材轉為離子態，進而影響鍍率，導致鍍膜速率與最初的氧化態靶材不同，因此有較薄的膜層厚度與較低的表面粗糙度值；氧化鈰薄膜表面硬度與原材304不銹鋼相比，有更高的硬度因此能保護基材，並且無論有無通入氧氣進行鍍膜，皆沒有太大影響；薄膜臨界荷重數值在L-6.2鍍膜參數中有最高的結果值，證實經濺鍍後的氧化鈰薄膜與基材有良好的附著性；氧化鈰薄膜能提升矽晶片與304不銹鋼基材的水滴接觸角，經過時效測試後極性力更接近0 dyne，同時有更好的親油效果，且不受基材所影響；最後將鍍製於304不銹鋼網氧化鈰薄膜，進行水與海水添加機油、廢油與柴油之油水分離測試，顯示鍍膜後材料與原材相比有更好的分離效能，證實氧化鈰沉積於基材上能提升疏水親油特性。

This study utilized RF Magnetron Sputtering equipment and divided the process into pure argon atmosphere and atmospheres with 6.2 sccm and 12.5 sccm of oxygen flow. CeO2 target material was used in conjunction with a power of 100 W to deposit cerium oxide (CeO2) films on silicon wafers, 304 stainless steel bulk material, and 304 stainless steel mesh. Initially, the research focused on the material properties of the films. The crystalline structure of the films was analyzed using a multifunctional high-power X-ray diffractometer (XRD). The surface morphology and cross-section were observed using a field emission scanning electron microscope (FE-SEM). An Atomic Force Microscope (AFM) was used for analyzing surface topography and roughness. The surface hardness was measured using a nanoindenter. The scratch test was employed to observe the critical load (Lc) for film delamination and evaluate the bonding ability between the film and the substrate. Subsequently, application-oriented tests were conducted. A water contact angle measurement instrument was utilized to determine the hydrophobic and oleophilic properties of the film, as well as surface energy. Furthermore, the original material and the coated filter were subjected to oil-water separation tests with various types of oils and seawater to verify the film's effective separation of oil and water properties.
Experimental results indicated that under low oxygen partial pressure, a partially oxidized Ce4O7 phase was present. The introduction of oxygen during the process led to more complete oxidation of cerium oxide, approaching CeO2. Surface and three-dimensional morphology observations revealed that increasing the oxygen flow during film deposition resulted in ionization of oxygen ions within the cerium oxide target. This affected the deposition rate, leading to thinner film thickness and lower surface roughness values due to the altered initial oxidized state of the target material. Comparatively, the surface hardness of the cerium oxide film was higher than that of the original 304 stainless steel, indicating improved substrate protection. The film's critical load value was highest in the L-6.2 film deposition condition, confirming strong adhesion between the sputtered cerium oxide film and the substrate. The cerium oxide film enhanced the water contact angle of silicon wafers and 304 stainless steel substrates. After aging testing, the polarity force approached 0 dyne, demonstrating enhanced hydrophobic effects and being unaffected by the substrate. Lastly, the stainless steel mesh coated with cerium oxide film underwent oil-water separation tests with water, seawater, machine oil, waste oil, and diesel oil. The results showed better separation performance of the coated material compared to the original material, confirming that cerium oxide deposition on the substrate improved its hydrophobic and oleophilic characteristics.

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