本研究主要利用飛秒雷射加工技術的優點如熱影響區極小、無重鑄層、加工尺寸小等，欲解決長脈衝雷射在加工過程中會有熱效應的問題，導致加工精度無法提升及材料強度降低。本研究乃是擬分析飛秒雷射在加工過程中與材料的交互作用，選用材料為316L不鏽鋼及玻璃，嘗試使用不同雷射參數（雷射功率、焦點位置、掃描速度等）的變化對照其材料加工後狀況及尺寸，觀察微結構的變化及現象進而找出相對關係。後期研究為參考其分析結果，再應用於工程製作的可行性研究。在不鏽鋼材料部分是進行不鏽鋼之心血管支架的製作，而在玻璃材料部分是進行玻璃內部光柵及薄玻璃裂片的製作，以原理和加工結果配合，以證明飛秒雷射加工之特性與優點。期望未來可廣泛應用於半導體、生醫技術、光電能源等不同領域的微奈米製造技術。

This thesis aims to improve thermal-effect issue happened in long-pulse laser processing by femtosecond laser, of which the advantages are high machining precision, minimal burrs and negligible heat-affected-zone. The issue of long-pulse laser processing usually causes poor machining precision and reduces the strength. In this research, the experiments showed the interaction of 316L stainless steel and glass with femtosecond laser processing. Based on experimental results, specific correlations between processing parameters (scanning speed, power and focus of laser beam) and the condition of sizes and microstructures of materials can be observed. Therefore, the results can be applied to coronary stents, internal glass grating and glass dicing. Combined the principle with processing results, it showed the unique characteristics and advantages of femtosecond laser processing. So, it is promising to apply to the precision manufacturers in semiconductor, bio-medical, and optoelectronic manufacturing technology.

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