研究生: |
連怡如 Yi-Ju Lien |
---|---|
論文名稱: |
高分子光柵機械力感測器之研製 Mechanical Force sensor fabrication by polymer diffraction grating |
指導教授: |
趙振綱
Ching-Kong Chao |
口試委員: |
何智廷
Chi-Ting Ho 曾垂拱 none |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2005 |
畢業學年度: | 93 |
語文別: | 中文 |
論文頁數: | 73 |
中文關鍵詞: | 全像術干涉技術 、感測器 、繞射光柵 |
外文關鍵詞: | diffraction gratings, sensor, holographic interferometric technique |
相關次數: | 點閱:228 下載:0 |
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由於光感測具有不受電磁干擾、體積小、信號易於傳輸等優點,且光對於微細變化的靈敏度比傳統電子感測器高出許多。因此我們提出結合光纖感測技術中之光柵結構與高分子材料進行一個新的感測器之製作想法,針對繞射光柵是否可運用在力感測器上,首先利用半導體製程技術與全像術干涉技術將繞射光柵設計製作於高分子材料上,再使用拉曼原理配合光柵繞射現象成功地運用光學量測機制,在張應力感測上製作出靈敏度為0.05N之感測器,並使用有限元素軟體驗證了實驗的趨勢與分析結果相同。
此感測器無須電力驅動且製程比一般感測器簡易,材料成本上也低於傳統矽基材,最大優勢在於此感測器為彈性體且無毒性,未來可運用在變形結構之力感測與醫療領域上。因高分子光柵感測器至今尚無相關文獻出現,未來尚有許多研究方向可進行,期望此方法可提供感測器更多元化之應用與發展。
Optical sensors are unaffected by electromagnetic field interference and can be made relatively compact with a diode source and detector. Optical sensors are also known for their sensitivity and high dynamic range. Furthermore, the sensors can be embedded in most structures with minimal modification. Here we present a new means of transducing strain along the axial direction using a diffractive Bragg grating sensor on polymer materials.
The diffraction gratings are successfully fabricated on a polydimethylsiloxane (PDMS) polymer using the holographic interference and micromolding technique. The micro MTS tensile test incorporated with the Raman experiment showed that a relationship between the load and the observed diffraction pattern shift could be obtained. The results show an excellent correlation between the optical measurements and load with a sensitivity of 0.05N.
The finite element method is also used to prove the experiment results. The advantage of this sensor is that it doesn’t need any electric power to drive the sensor, it is simple for fabrication, and its cost is lower than the traditional silicon based materials. Another advantage is that the sensor is elastomer material, it doesn’t have poison, and it can be used in the transducing stress on the deformed structure and medical area.
It only has little references related to this diffractive Bragg grating sensor on polymer materials, and it needs more research in many different directions to be done. Finally, we hope this method can provide more versatile application and development on sensors.
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