本文所研究主題為TFT-LCD玻璃基板之風刀乾燥箱，並將其抽風口壓力及風刀傾角設定為探討變數；利用計算分析軟體建構實體的數值模型，並且依照實際的情況設定其環境邊界條件，透過動態網格模擬玻璃基板於箱體內水平移動受到風刀出口氣體衝擊後，將其表面上的水氣與塵埃粒子帶走，經由抽風口排出。由數值模擬的結果發現，利用動態網格模擬的方式，可以明確看見玻璃基板移動對風刀出口以及外部湧入氣體所造成的影響，因此比穩態模擬方式更加接近風刀乾燥箱之真實狀況，另外抽風口帶離箱體內部氣體量大於風刀出口量，因此箱體內部形成負壓，而抽風口負壓大小與料口湧入氣體總量呈正比，且抽風口負壓越大，其箱體內部流體往-Z軸方向流動速度越快，因此對於排除液滴所造成阻礙越大。接下來將風刀傾角縮小後，風刀出風口氣體X軸動量變大，因此與入料口湧入氣體撞擊產生迴流位置點距離風刀出風口較遠，所形成的迴流相對較強，造成液滴排除阻礙。綜合本文結論可提供設備廠商進行風刀乾燥箱性能之改善措施參考，以提高後續製程良率，並藉由此經驗來做為大尺寸風刀乾燥箱體實體設計之前置步驟以及後續相關研究之參考。

Designing the drying module for LCD glass substrate is an important and challenging task for TFT-LCD industry and thus becomes the topic of this research. During the cleaning and drying process, LCD glass plate enters from the inlet end of the drying module and moves toward wind knife in a constant velocity. The strong airflow from wind knife impinges the substrate with a sharp angle to remove the thin water film and the dust on the plate surface. Then, the substrate moves continuously to exit from the outlet end. Obviously, this cleaning procedure is a dynamic phenomenon which cannot be simulated by a steady CFD calculation. Here, with the aids of CFD code FLUENT, the flow field simulation for a moving glass plate inside the drying module is accomplished by applying the method – moving mesh of unsteady state and boundary conditions based on the practical situation. The numerical results demonstrate clearly that complicate interactions exist among the moving plate, wind-knife air stream, and the incoming flows from both inlet and outlet ends inside the drying module. Note that, due to the interaction among the rebounded airflow, the incoming stream from inlet end and exhausting flow, there is a severe circulation flow existed in the bottom portion of module near the inlet end. Hence, humid airflow and water drop cannot be expelled from air exhauster smoothly. In addition, a parametric study is performed with emphases on exhauster pressure and wind knife’s inclined angle to realize their influences. It is found that a bigger inclined angle and a smaller exhauster pressure can reduce the circulation flow region and water-drop accumulation. In conclusion, this study offers a systematic analysis means for designing the drying module. Also, an extensive discussion on key parameters is summarized to serve as the design guideline for the larger LCD drying module.

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