本研究研發整合不同射出成形製程應用於離軸非球面反射式光柵光學元件 (Off-Axial Aspherical Reflective Grating Optical Element, OAA-RGOE) 製程，以降低非球面誤差及增進光學性能。本論文延續先前研究成果，利用射出機台之週期訊號擷取與壓電致動器控制系統作結合之微振動式射出壓印成形(Micro Vibratile Injection Embossing Molding, MV-IEM)與變模溫製程(Varithermo Mold Temperature, VMT)，並加入射出壓縮成形(Injection Compression Molding, ICM)作製程整合，以提升光柵元件之成形。研究方式首先於傳統射出成形進行OAA-RGOE之成形實驗尋找最佳射出成形參數，後續進行不同製程之成形比較。探討巨觀尺度下非球面之殘餘誤差(Residual error, Rt)及微觀尺度下微結構之成形複製率(Groove Filling Ratio, GFR)。結合不同射出成形製程下，可得最佳之Rt值為16.05 μm及GFR為92.27 %。加入VMT製程技術，可有效改善因肉厚不均所形成翹曲缺陷，但對微結構複製率具些微影響，Rt值可降至15.63 μm，GFR稍降低至91.14 %。OAA-RGOE以光學單頻譜檢測，多種單頻譜皆有聚焦特徵，雜散光檢測最小為6.39 %。未來研究可進行非球面設計值與實際模仁之殘餘誤差並優化模仁設計，使光柵元件精準度更有效提升。

This study aims to fabricate an off-axial aspherical reflective grating optical element (OAA-RGOE) with micro-structures using integration of injection molding processes. The molding cycle signal and control system of the piezo actuator have been integrated with Micro Vibratile Injection Embossing Molding (MV-IEM), Varithermo Mold Temperature (VMT), and Injection Compression Molding (ICM) for process integration to enhance the precision of the grating element. First, the OAA-RGOE is carried out by conventional injection molding machine in order to find out the operational windows injection molding parameters. Effects of residual error (Rt) of the off-axial aspheric surface and Groove Filling Ratio (GFR) are discussed; combination in injection molding processes are also evaluated. The combination of MV-IEM and ICM show the best results, which Rt value can reach to 16.05 μm and GFR to 92.27 %. Furthermore, the additional VMT in MV-IEM and ICM process is able to improve warpage deformation caused by the uneven grating thickness, yet slightly influence on GFR microstructure replication. Results showed that the Rt value can be reduced to 15.63 μm and the GFR to 91.14 %. As a result of optical detection, the OAA-RGOE owns focusing characteristics with certain wavelengths. The smallest stray light detection can detect as 6.39 %, as compared with previous study as 5.84 %. For future works, the residual error between off-axial aspherical design and the measurement results of OAA-RGOE can be evaluated as well as optimized the mold insert design.

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