本研究以簡單與低成本的製程技術製備高響應的紫外光感測元件，內文將分為兩個部分，第一個部分為研究氧化鋅鎵物性及光特性，接著嘗詴結合氧化鎵及摻氮超奈米鑽石，量測其紫外光響應；第二個部分為研究氧化鋅奈米柱物性及光特性，並嘗詴結合氧化鎵、摻氮超奈米鑽石及氧化鋅鎵，研究其紫外光響應。
研究發現，氧化鋅鎵隨著退火溫度提高，結晶品質提升，導電性變好，光響應也越高，且增長幅度在高於退火 800 度後縮小，進一步研究，氧化鋅鎵成長於摻氮超奈米鑽石，導電度將大幅提升，而氧化鋅鎵成長於氧化鎵上有助於降低暗電流，提升光暗電流比。
第二部分，氧化鋅奈米柱在水熱溶液濃度為 30 mM 時，成長 15 分鐘相較於成長 30 分鐘之光暗電流比高，而響應率則是後者較高，可歸因於後者之電阻較低。
進一步研究，氧化鋅奈米柱在成長於氧化鋅鎵與超奈米鑽石複合結構上，在 375 nm的紫外光照射下，皆可提升其光暗電流比，因為能隙差，使其有足夠大的內建電場，對於使光生電子電洞對分離有所增益，進而提升其光響應，其中，當氧化鋅奈米柱(30mM15min)成長於氧化鋅鎵(90W45min_A800)上，在 375 nm 的紫外光照射下，光暗電流比可高達 4.909×104。本研究顯示氧化鋅奈米柱與氧化鋅鎵之奈米複合結構為有前景之紫外光感測器。

In this study, a high-response ultraviolet photodetector is prepared by a simple and low-cost process. Through the process, ZnO nanorods (ZNR) and Zinc Gallium oxide (ZGO) were successfully prepared, and UV sensing properties were investigated. Futhermore, both materials were combined with gallium oxide (GaO) and ultra-nanodiamonds (N-UNCD), which would be studied with their photodetectors’ performance. The study found that as the annealing temperature increases, the crystal quality of zinc gallium oxide improves, the conductivity becomes better, and the photoresponse is also higher, and the growth rate decreases after the annealing temperature is higher than 800 degrees. When ZGO grows on N-UNCD, the conductivity of component will be greatly improved, and the growth of ZGO on GaO will help reduce dark current and increase the switch ratio. In the second part, when the ZNR are grown in a hydrothermal solution at a concentration of 30 mM, the switch ratio was higher for 15 minutes than for 30 minutes, and the responsivity was higher for the latter, which could be attributed to the lower resistance of the latter. When ZNR are grown on ZGO and N-UNCD to form hybrid structure, they can increase the switch ratio under the irradiation of 375 nm ultraviolet light, because the difference in energy gap makes it has large enough of built-in electric field, which is beneficial to the separation of photogenerated electron-hole pairs, thereby improving its photoresponse. Among them, when ZNR(30mM15min) are grown on ZGO (90W45min_A800), under the ultraviolet light at 375 nm irradiation, the switch ratio can be as high as 4.909×104 . This study shows that the nanohybrid structure of ZNR and ZGO is a promising ultraviolet photodetector.

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