本文旨在應用無桿氣壓缸結合壓電致動器，發展XYZ 三軸長行程奈米精度伺服定位平台與控制，大行程由氣壓伺服系統進行粗定位，小行程由壓電致動器作補償。其中X 軸為獨立軸，YZ 兩軸固定在一起，構成龍門型三次元定位平台，本文主要探討固定在一起的YZ 軸之定位效果。
控制器發展改良式距離基礎之解耦合自組織模糊滑動控制器(MSD-DSOFSMC)，使之可以同時擁有智慧型控制等優點，希望能達到最佳的控制性能。實驗證實此系統可成功分別將Y、Z 軸定位到位置感測器最佳解析度20nm、0.1µm。
另外，本文亦對單軸氣壓-壓電伺服系統的軌跡控制進行探討，實驗誤差約在0.5mm左右，不如預期，控制策略有待後續研究。

This thesis aims to develop an intelligent hybrid pneumatic-piezoelectric X-YZ platform with large stroke and nanometer precision. In the single axis the pneumatic servo system serves to position in coarse stroke and the piezoelectric (PZT) actuator compensates fine stroke. This multi-axis system is constituted with the separated X-axis and the combined Y- and Z-axis. The thesis focuses on the study of the positioning control of Y- and Z-axis.
The modified signed-distance decoupling self-organizing fuzzy sliding mode controller (MSD-DSOFSMC), which contains signed-distance fuzzy sliding mode control, self-organizing control and decoupling control, is developed for developing the intelligent controller and solving the decoupling problem. The experiment results show that the system can achieve excellent positioning response and accuracy of 20mm and 0.1µm for Y- and Z-axis with high response for maximum stroke of 250mm.

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