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| 研究生： |
李奇峰 Chi-feng Li |
|---|---|
| 論文名稱： |
繞射元件在微光讀寫頭之應用研究 Application of Diffractive Elements to Micro Pickup Head |
| 指導教授： |
李三良
San-Liang Lee 陳政寰 Cheng-huan Chen |
| 口試委員: |
劉政光
Cheng-Kuang Liu 田仲豪 none |
| 學位類別： |
碩士 Master |
| 系所名稱： |
電資學院 - 電子工程系 Department of Electronic and Computer Engineering |
| 論文出版年： | 2007 |
| 畢業學年度： | 95 |
| 語文別： | 英文 |
| 論文頁數： | 49 |
| 中文關鍵詞： | 繞射元件 、準直透鏡. 分光元件像散透鏡 、微型讀寫頭 |
| 外文關鍵詞： | diffractive optical elements, beam splitter, astigmatic lens, micro pickup head |
| 相關次數： | 點閱：181 下載：1 |
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本論文主要是探討三種繞射元件的微製程分析，元件分別為準直透鏡、分光元件與像散透鏡。將連續表面的元件量化為多階的表面結構以利於採用半導體製程技術製造，目的在於將階梯化結構的繞射元件製造在矽基板上組成完整的光學系統以達到讀寫頭的功能。此種微型讀寫頭具有微型化與低成本的優勢。
因為繞射元件的表面結構會調變入射雷射光為預定的場形與工業上的應用功能，所以繞射元件對製程所產生的誤差非常敏感，因此線寬的誤差、蝕刻的誤差與光罩校準的誤差將會使元件無法正常發揮預期的功能。本文內容中有三種元件以原子力顯微鏡、掃描式顯微鏡的量測結果與效率的測量，最後也以四階分光元件為例，利用G-Solver 軟體來對上述的誤差來進行容差分析，以便了解各種製程誤差對元件功能的影響大小。
The objective of this thesis is to discuss the microfabrication of three kinds of diffractive optical elements, namely, collimator, beam splitter, and astigmatic lens. Multilevel structures quantized from continuous surface relief can be fabricated with semiconductor manufacturing technology. The purpose is to integrate all the diffractive elements with multilevel structures into the optical system on the silicon for a miniatured pickup head, which has the advantages of compact form factor, light weight and low cost.
The surface structures of a phase diffractive optical elements can modify laser beams into a specified patterns and proveide new optical functions for specific industrial application. However, the diffractive optical elements are highly sensitive to the errors of microfabrication. The errors of mask alignment, etching and linewidth have significant influence on the optical functions of elements. The paper shows the results of measurement with AFM, SEM and efficiency of the diffractive optical elements. At last, a fan-out element has been chosen to carry out tolerance analysis on alignment errors, etching errors and linewidth errors by using G-Solver software.
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