超音波焊接在高分子的黏合應用越來越多，超音波輔助加工也應用於微加工上，但直接使用超音波磨料切削，因其刀具也產生磨耗，故其精度的維持一直無法改善，原因之一為刀具的材質大都為工具鋼和碳化鎢，在高頻率切削下的磨耗率相當大，因此選用硬質刀具或是硬質薄膜鍍在刀具上，降低磨耗率，使加工精度得以控制在一定範圍，將使超音波切削加工應用更為廣泛。
本實驗選擇類鑽碳膜DLC(diamond like Carbone) ，化學沈積鑽石 CVDD(chemical vapor deposition diamond)，電著鑽石CPD (composite plating diamond)，來製成刀具，觀察其實際磨耗量和與傳統工具鋼和碳化刀具做一比較，評估鑽石膜或是鑽石塊在超音波切削加工中應用的可行性。
在針對磨料硬度對磨耗影響，在此研究結果中，使用較低硬度磨料有助改善刀具磨耗，但效果未達需求。在固定刀具的其他磨耗參數後，使用不同鑽石刀具觀察其磨耗量，實驗結果顯示: (1)在PVD 製程下的DLC刀具因硬度不足無法抵抗高頻率的磨耗，刀具壽命無法有效提升，第一次切削即產生磨耗。(2) CVDD刀具則因缺乏韌性而破裂，且其接面黏結力也不夠，造成膜層剝離，刀具壽命反而最短，開始切削隨即剝離，未達預期目標。(3) CPD刀具則因固持鑽石的金屬鎳被磨光，造成鑽石顆粒整顆脫落，但其刀具壽命已較DLC刀具壽命佳，對於超音波加工精度維持有幫助，是一種較為可行的超音波刀具材料。

More and more applications of ultrasonic welding are used in the bonding of polymer, and ultrasonic assisted machining is also used on micro machining. Due to the wear of tool, the accuracy dimensions are not maintenance and improvement by using abrasive slurry to cut work piece directly. One of reasons is that most of the materials of tools are tool steel and tungsten carbide, which cause a higher wear rate in the circumstances of the high-frequency mechanical motion. To use the tool consisting of using hard material or hard thin film coated on the tool to reduce the wear rate of the blade in ultrasonic machining, and therefore the wear rate can be controlled within a small range. By this scheme, it can expand the range of applications of ultrasonic machining.
After researching proper materials of tools, the diamond is one of the hardest materials in the world that has a great ability to resist the wear. Therefore we use DLC (diamond like Carbon), CVDD (chemical vapor deposition diamond), CPD (composite plating diamond) and PCD (polycrystalline diamond) to make tools. Afterwards we observe its amount of actual wear and compare with tool steel and silicon carbide tool. From these results, we can evaluate the feasibility of applying diamond coating tool or diamond block tool for ultrasonic machining.
Besides, we also study the influence of abrasive hardness on wear rate. The results of this study show that the wear of blade can be reduced by using the lower hardness of abrasive, but the effect is below our demand with bad influence on material removal rate sometimes. We observe the amount of wear by using various diamond blades under fixing other parameters of wear rate. From the results of experiment, they show that (1) the DLC tool in PVD process cannot resist the frequent wear because its hardness is not enough. Therefore it cannot effectively improve the tool life, and it generates wear at the first cutting. (2) Fractures are occurred on CVDD tool due to the lack of toughness, and the films are stripped because the adhesive force of junction is not enough. The films are immediately stripped while begin cutting, so it has the shortest lifetime among these tools. The effect of CVDD tool does not achieve the desired expectation. (3) For CPD tool, the nickel layer used for fixing was polished resulting in whole diamond particle to come off. However, its lifetime is longer than DLC tool. It has the advantage of maintaining the accurate dimensions in ultrasonic machining. Hence CPD is a better feasible material of ultrasonic tool.

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