本研究以奈米壓痕及表面聲波量測技術，來量測鍍鐵-鎳合金薄膜的楊係模數及硬度。蒸鍍鐵鎳薄膜時基板溫度為27℃及270℃，蒸鍍薄膜厚度為10 nm到130 nm。可用原子力顯微鏡量測其表面粗糙度。從XRD的繞射圖了解晶粒大小及I111/I220強度比，I111及I220是鐵-鎳合金薄膜上(111)及(220)二平面的繞射波峰。我們從試驗中發現，楊氏模數及硬度和薄膜厚度間有關係。從薄膜厚度從10 nm到70 nm時，楊氏模數會上升，而厚度在70nm時，楊氏模數達到最大值，薄膜厚度從70 nm到130 nm時，楊氏模數會開始下降；隨薄膜厚度增加及結構愈鬆散硬度會逐漸下降,晶粒大小及緻密度為影響硬度變化的主因。影響鐵-鎳合金薄膜的楊氏係數為結構性質，如繞射強度比和密度，而影響硬度大小為薄膜厚度、晶粒大小及緻密度。

Young`s modulus Ef and hardness Hf of Fe-Ni thin films were measured by the nano-indentation and Surface Acoustic Waves technique. Fe-Ni were made under various conditions with the film thickness tf varied form 10 to 130 nm and deposition temperature Ts from 27℃ to 270℃ in vacuum.The surface morphology of each film was examined by an atomic force microscope, and the surface roughness parameters . From XRD diffraction studies we estimated the grain size D and the ratio I111/I220 , where I111/I220 are the peak amplitudes of the (111) and (220) diffraction lines , of the Fe-Ni films . We also find that both Ef and Hf are dependent on tf .In short , Ef increases when 10< Ef <70, reaches a maximum at tf = 70 nm ,and decreases afterwards , Tf increasing and structure of low densification would decrease Hf gradually .The Ef data are analyzed based on the structural properties , such as the ratio I111/I220 and the density δ, of each Fe-Ni film . The Hf data are discussed based on the tf dependence of grain size D and densification .

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