熱電薄膜發電器乃利用熱電效應，將溫度差轉為電能輸出。熱電薄膜發電器主要用微機電製程，利用熱蒸鍍沉積熱電薄膜並以濺鍍沉積鋁橋。量測方式以溫控式加熱器給予熱源，經由Agilent 34970A資料蒐集交換器來讀取輸出的電壓、電流值和功率。
本文分別使用三種不同基材包括：聚醯亞胺基材(Polyimide, PI)、康寧玻璃7740(Corning Pyrex® 7740 Borosilicate Glass)、具氮化矽薄膜之矽基材做為熱電薄膜發電器的基材。研究結果以PI基材的熱電薄膜發電器具較佳電壓輸出。
以熱蒸鍍沉積碲化鉍熱電薄膜，不同鍍率對於所沉積之熱電薄膜成份有重要的影響，因此經由X光能量散佈光譜儀(EDS)和四點探針面電阻儀之量測與分析找出熱電薄膜較好品質的沉積鍍率。本研究結果由P-type熱電薄膜(鍍率12Å/s)及N-type熱電薄膜(鍍率3Å/s)所製造的熱電薄膜發電器可得到較高的性能。
熱電薄膜發電器之結構設計亦影響其整體性能，本文於直徑為9.3mm面積之範圍內，設計並串聯P-type與N-type熱電薄膜。由研究結果得知，以兩組P-type與N-type串聯之結構設計製作熱電薄膜發電器有較高的輸出電流與功率。而採用四組P-type與N-type串聯之結構設計則有較高的輸出電壓。

The thermoelectric effect of thermoelectric generators is used to convert temperature difference to corresponding electrical power. Thermoelectric generators are fabricated by MEMS process which includes bismuth-telluride-based alloy thin film deposited by thermal evaporation, patterning by photolithography, and aluminum bridge deposited by sputter. The output voltage, current and power of the thin film thermoelectric generators are measured and recorded by Aligent 34970A data collector while a heater with temperature control is applied on hot junction.
The three substrates as polyimide sheet, Corning Pyrex® 7740 borosilicate glass, and silicon nitride thin film on silicon substrate are used to fabricate thermoelectric generators. The output voltage represents a good performance while thermoelectric generators are fabricated on polyimide sheet.
Material compositions are affected while bismuth-telluride-based alloy thin films are deposited by thermal evaporation. EDS (Energy Dispersive Spectrometer) and four-point probe are used to find the optimal deposition rate of bismuth-telluride-based alloy. From the results of current work, P-type bismuth-telluride-based alloy with 12 Å/s and n-type bismuth-telluride-based alloy with 3 Å/s can fabricate a high performance thermoelectric generator.
The output power can also be affected by structure design of thermoelectric generators. P- and n-type legs are series-wound, and fixed on an area with diameter of 9.3mm. From the results of current work, the output current and the power have high performance under p- and n-type legs with two pairs. However, the output voltage has high performance under p- and n-type legs with four pairs.

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