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研究生: 陳敬樺
Ching-Hua Chen
論文名稱: 智慧操控紫外光二極體發光功率
Smart control of the light power of ultraviolet light-emitting diodes
指導教授: 葉秉慧
Pinghui Sophia Yeh
口試委員: 葉秉慧
Pinghui Sophia Yeh
李志堅
Chih-Chien Lee
周錫熙
H-H Chou
徐世祥
Shih-Hsiang Hsu
學位類別: 碩士
Master
系所名稱: 電資學院 - 電子工程系
Department of Electronic and Computer Engineering
論文出版年: 2020
畢業學年度: 108
語文別: 中文
論文頁數: 137
中文關鍵詞: 紫外光二極體監控光偵測器監控響應率智慧操控
外文關鍵詞: UV LED, monitoring photodiode, monitoring responsivity, Smart control
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  本論文使用商業紫外光發光二極體(UV LED)晶圓製作積體化UV LED與監控光偵測器(monitoring photodiode; MPD)。量測UV LED的基本光電特性,量測MPD的基本光電特性,包括暗電流與不同偏壓下的光電流和量子效率。以MPD即時監控同一晶片上的UV LED發光功率,量測MPD不同偏壓下的監控響應率,並以運算放大器(Operational Amplifier)將MPD光電流訊號轉成電壓訊號,再將電壓信號傳送進Arduino的類比數位轉換器(Analog-to-digital converter,ADC),最後藉由藍牙傳輸至手機端顯示UV LED光功率。
  在UV LED光電特性量測下,紫外光發光二極體啟動電壓(Turn On Voltage)約為3.05 V,其串聯電阻為10.2 Ω。當紫外光發光二極體電流為20 mA下,光輸出功率為4.43 mW。
  當UV LED電流由0 mA增加至20 mA,MPD在偏壓0 V下,其光電流由0 A增加至8.64 × 10-5 A,監控響應率維持在約20 mA/W;在逆向偏壓3 V下,其光電流由0 A增加至1.02 × 10-4 A,其監控響應率維持在22至23 mA/W,並將光電流對光功率作圖可得非常好的線性關係。
  在模組電路中,由手機設定發光二極體驅動電壓範圍為3.082 V至3.134 V,其對應注入電流為8 mA至13 mA,手機端顯示的光功率為1.72 mW至2.73 mW,MPD電壓為3.02 V至4.78 V,光功率最大誤差為4.86 %。


  In this paper, a commercial Ultraviolet Light Emitting Diode (UV LED) wafer is used to fabricate integrated UV LED and monitoring photodiode (MPD). The characteristics of the basic photoelectric properties of UV LED, as well as MPD basic photoelectric properties including dark current, photocurrent and quantum efficiency under different bias voltages were measured The light power of UV LED on the same chip is monitored by using MPD in real time under different bias voltages. Operational Amplifier converts the photocurrent signal from MPD to voltage signal and send it to the Analog to Digital Converter (ADC) in Arduino. The display of UV LED light power is finally transmitted to mobile phone via Bluetooth.
  The measured UV LED has characteristics of turn-on voltage and series resistance of 3.05 V and 10.2 Ω, respectively. The UV LED light power shows 4.43 mW when the injection current is 20 mA.
  When the UV LED current increases from 0 mA to 20 mA and MPD is biased at 0 V, its photocurrent increases from 0 A to 8.64 × 10-5 A and the monitoring responsivity of MPD is maintained at about 20 mA/W; in reverse bias at 3 V, its photocurrent increases from 0 A to 1.02 × 10-4 A and the monitoring responsivity is maintained at 22 – 23 mA/W. Therefore, a very good linear relationship can be obtained by plotting photocurrent to light power
  In the module circuit, the LED driving voltage range is set by the mobile phone to be 3.082 V to 3.134 V, and the corresponding injection current is 8 mA to 13 mA. Thus, the light power displayed on the mobile phone is 1.72 mW to 2.73 mW, and the MPD voltage is 3.02 V to 4.78 V. Based on measurements displayed on the mobile phone compared to the Automated Testing Equipment (ATE) of Chroma, the maximum error of light power is 4.86%.

目錄 摘要 Abstract iii 致謝 v 圖目錄 ix 表目錄 xii 第一章 導論 1 1.1 緒論 1 1.2 文獻回顧與研究動機 3 1.3 市售紫外光偵測器介紹 14 第二章 光偵測器理論介紹 18 2.1 光偵測器工作原理 18 2.2 光偵測器架構分類 21 2.2.1 p-n接面光二極體(p-n Photodiode) 22 2.2.2 p-i-n接面光電二極體(p-i-n Photodiode) 25 2.2.3 蕭基位障光電二極體(Schottky Barrier Photodiode) 29 2.2.4 雪崩型光二極體(Avalanche Photodiode) 31 2.2.5 異質接面雪崩光二極體 34 2.2.6 光電晶體 36 2.3 光偵測器檢測參數 38 2.3.1 量子效率(Quantum Efficiency, QE) 38 2.3.2 響應率(Responsivity, R) 41 2.3.3 響應速度(Response Speed) 42 第三章 Arduino與MIT App Inventor 2介紹 43 3.1 Arduino介紹 43 3.2 Arduino Uno Rev3 47 3.3 HC-05藍牙模組 49 3.4 MIT App Inventor 2 52 第四章 元件設計與儀器介紹 54 4.1 元件設計與製作 54 4.2 元件製程 56 4.2.1活化製程(Activation) 58 4.2.2絕緣製程(Isolation) 59 4.2.3高台圖型製程(MESA) 61 4.2.4二氧化矽絕緣層沉積 62 4.2.5 ITO透明導電層沉積 63 4.2.6 N&P型電極沉積 64 4.3 製程儀器介紹 65 4.3.1旋轉塗佈機(Spin Coater) 65 4.3.2光罩對準機(Mask Aligner) 66 4.3.3電漿輔助化學氣相沉積系統 68 4.3.4感應耦合電漿式離子蝕刻機(ICP-RIE) 70 4.3.5射頻濺鍍機(RF Sputter) 72 4.3.6電子束蒸鍍機(E-beam Evaporator) 74 4.3.7快速升溫退火爐(Rapid thermal annealing, RTA) 75 4.4 量測儀器介紹 76 4.4.1表面輪廓儀(Alpha step) 76 4.4.2 L-I與I-V量測系統 77 4.4.3外部量子效率量測系統 78 4.4.4脈衝式雷射二極體LIV系統 79 4.4.5電源供應器(Source Meter) 81 第五章 結果與討論 84 5.1 積體化MPD監控光偵測器 84 5.1.1 UV LED基本光電特性 84 5.1.2 MPD監控光偵測器基本特性 87 5.1.3 MPD監控光偵測器監控響應率 92 5.1.4監控光偵測器與運算放大器電路設計 96 5.2 Arduino遠端操控模組 97 5.2.1遠端操控系統架構圖 97 5.2.2 Arduino程式碼 98 5.2.3 App inventor 2程式碼 102 5.3 模組電路量測結果與討論 107 5.3.1 模組電路圖 107 5.3.2 驅動UV LED 實際結果與討論 108 第六章 結論與未來展望 112 6.1 結論 112 6.2 未來展望 114 參考文獻 115

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