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研究生: 曾秉豐
Zeng-Bing Fong
論文名稱: 中空微針陣列設計與製作之研究
The Study on Design and Fabrication for Hollow Microneedle Array
指導教授: 趙振綱
Ching-Kong Chao
口試委員: 張瑞慶
Rwei-Ching Chang
黃育熙
Yu-Hsi Huang
林宗鴻
Tsung-Hung Lin
學位類別: 碩士
Master
系所名稱: 工程學院 - 機械工程系
Department of Mechanical Engineering
論文出版年: 2016
畢業學年度: 104
語文別: 中文
論文頁數: 121
中文關鍵詞: 接觸式曝光中空微針陣列有限元素動態穿刺力模擬
外文關鍵詞: contact exposure, hollow microneedle array, finite element of dynamic piercing.
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為了使病患在注射時不易感到疼痛,有許多文獻探討了微針陣列
的幾何設計及製作,但鮮少有針對動態穿刺破壞力去探討。本研究透
過有限元素軟體分析,針對八角形、六角形、圓錐形及金字塔形之基
底進行動態穿刺力模擬。模擬結果為金字塔形中空微針陣列為最佳穿
刺力之微針陣列之設計。實驗的部分,利用接觸式曝光與立體微透鏡
光罩可製作出中空微針陣列。中空微針陣列之幾何外型將受微透鏡陣
列尺寸及負光阻塗佈高度之影響。當光阻之塗佈厚度越高時,其微針
底角會越趨近於預測。


In order to not easily make patients feel pain during insertion. There
are many researchs have explored the geometric design and fabrication of
microneedle array, but fewer explore inserting destruct. In the dynamically
penetrating simulation, the basic geometry of the octagon, hexagon, taper ,
and pyramid could be obtained by using finite element software ANSYS
in this study. The results showed that pyramidal microneedle array are the
best design of penetrating.The hollow microneedle array is fabricated
successfully by contacting exposure with three-dimensional mask. It is
found that the geometry of the fabricated microneedle array are affected by
square metal aperture stop and the altitude of photoresist. When the
photoresist coating thickness is higher, the bottom corner will be more
close to predict.

中文摘要........................................................................................................................ I ABSTRACT .................................................................................................................. II 誌謝.............................................................................................................................. III 目錄.............................................................................................................................. IV 圖目錄.......................................................................................................................... VI 表目錄........................................................................................................................... X 第一章 緒論.................................................................................................................. 1 1.1 研究背景、動機與目的 ................................................................................ 1 1.2 皮膚組織介紹 ................................................................................................ 2 1.3 中空微針陣列簡介 ........................................................................................ 4 1.4 文獻回顧 ........................................................................................................ 6 1.4.1 微針陣列之模擬分析 ........................................................................ 6 1.4.3 方形中空微針陣列製作 .................................................................. 24 1.5 論文架構 ...................................................................................................... 28 第二章 模擬設計........................................................................................................ 30 2.1 微針穿刺力之動態模擬分析模擬 .............................................................. 30 2.1.1 ANSYS 模擬軟體之介紹 ............................................................... 30 2.1.2 Explicit dynamics 模組介紹 ........................................................... 31 2.1.3 相異基底形狀之微針模擬設定 ...................................................... 31 第三章 中空微針陣列之製作.................................................................................. 50 3.1 利用光路預測計算公式定義立體光罩參數.............................................. 50 3.2 中空微針陣列之製作.................................................................................. 52 3.3 中空微針之製作流程 ................................................................................. 53 3.3.2 熱熔法 ............................................................................................. 56 3.4 立體光罩製作.............................................................................................. 58 3.4.1 金屬光欄製作 .................................................................................. 63 3.4.2 立體光罩製作 .................................................................................. 67 3.5 搭配立體光罩製作JSR-126N 中空微針陣列.......................................... 71 第四章 結果與討論.................................................................................................... 74 4.1 穿刺力之動態模擬分析 .............................................................................. 74 4.1.1 相異基底微針陣列之收斂性分析 ................................................. 74 4.1.2 相異基底形狀之模擬結果 .............................................................. 75 4.1.3 與文獻驗證 ...................................................................................... 84 4.2 模擬之結果討論.......................................................................................... 85 4.2.1 模擬之奇異點討論 ......................................................................... 85 4.2.2 模擬結果討論 ................................................................................. 85 4.3 中空微針陣列之製作.................................................................................. 95 4.3.1 立體光罩之製作結果 ...................................................................... 95 4.4 中空微針陣列製作之結果討論 ............................................................... 111 4.4.1 微針尺寸之誤差討論 .................................................................... 111 4.4.2 微針幾何外型討論 ........................................................................ 113 4.4.3 中空微針之底角分析 .................................................................... 116 第五章 結論與未來展望.......................................................................................... 117 5.1 結論............................................................................................................ 117 5.2 未來展望.................................................................................................... 117 參考文獻.................................................................................................................... 119

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