在現今探測距離技術中，使用光的LiDAR在對於機器人、無人自駕車等等都佔有一席之地。而傳統LiDAR是以光學與機械式部件來做光束的掃描，在不考慮LiDAR的高價位下，其在嚴峻的工作環境下，掃瞄速度、穩定性、體積小特性是需要顯著地提高。因此快速掃瞄與積體化的LiDAR是未來的發展方向。
本論文中，首先驗證光測距技術中的FMCW理論，設計並實驗量測以FMCW原理下的檢測距離與速度，根據光源與系統的穩定性，在1公尺內其空間深度解析度可達到1mm，其距離之絕對誤差可以達到6mm，而單純使用都卜勒之量測速度絕對誤差為0.6mm/s，而在0.5公尺內同時量測距離與速度，其距離最大誤差為18mm，其速度最大誤差為1.3mm/s。
而為了要達到可靠的掃描穩定性與積體化LiDAR，本論文從兩種角度不同的理論出發，分別為電磁波的相位陣列理論以及在光狹縫繞射的Rayleigh-Sommerfeld理論，分析並模擬驗證兩種理論的優劣勢，並使用此兩種理論作為設計與模擬的依據，設計並模擬光學相位陣列來達到波束型成的效果，其中包括耦光元件、分光元件、相移元件與發射陣列波導光柵。
最後為了控制光學相位陣列，補償在晶片上的製程誤差造成的相位偏移，調製相位則使用基因演算法來優化控制的相位參數。

In modern detection and ranging technology, Light Detection and Ranging (LiDAR) systems are used in almost every robotics and autonomous vehicles. Traditional LiDAR systems utilize free-space optics and mechanical components to steer the beam. Regardless the price, its scan rate, stability and large size still need significant improvements in harsh environment. For this reason, high scan rate and integrated LiDAR are the trends in the near future.
In this thesis, we first verify the theory of frequency-modulated continuous-wave (FMCW) by designing experiments to acquire the distance and velocity information. Under certain linearity and stability of light source, a spatial resolution of 1-mm and a range error of 6-mm will be demonstrated through the distance characterization. The velocity test also shows a velocity error of 0.6-mm/s in the range of 1 meter. For the simultaneous measurement on the distance and velocity, the distance error of 18-mm and velocity error of 1.3-mm/s will be illustrated.
In order to obtain the stability and integrated LiDAR, analysis and comparison are made between the electromagnetic wave phase array theory and Rayleigh-Sommerfeld multi-slits diffraction theory. Then the optical phase array, consisting the coupler, splitter, phase shifter and emitter array, will be designed and simulated for beam forming.
Finally we will demonstrate the phase distribution of an optical phase array using a genetic algorithm to compensate phase error from fabrication process variation.

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