使用射頻磁控反應式濺鍍法製備異質奈米材料於SA(100)、SA(012) 、LTO(012)基板上。本實驗分為二部份，一為先行沉積金紅石結構二氧化鈦於以上各種基板上，探討金紅石結構二氧化鈦奈米柱形貌與不同收尾狀態；另一則是將其二氧化釕沉積於第一部分所製備的二氧化鈦之上，探討其異質奈米材料的疊接於不同介面有何變化。以上皆使用拉曼散射光譜儀(Raman)、Ｘ光繞射儀(XRD)、場發射式電子顯微鏡(FESEM)及X光光電子能譜儀(XPS)，來探討二氧化鈦及二氧化釕沉積於不同基板上，對其異質接面奈米結構的表面形貌、晶體結構以及光學特性。
場發射式電子顯微鏡(FESEM)呈現出排列整齊且垂直成長的R-TiO2於SA(100)基板，不同於SA(012)、LTO(012)基板上所呈現，傾斜約33度角的R-TiO2；從Ｘ光繞射儀(XRD)得知於SA(100)基板上的 R-TiO2成長方向為(001)，換言之，於SA(012)、LTO(012) 基板上的 R-TiO2成長方向則是(101)；藉由拉曼散射光譜儀(Raman)辨別樣品的晶體結構與品質，且其譜線顯示奈米尺寸的二氧化釕及二氧化鈦會造成譜線的Eg mode半高寬和紅移現象；X光光電子能譜儀(XPS)來得到定性及定量分析，其元素組成為Ti:O2與Ru:O2為1:2。
場發射式電子顯微鏡(FESEM)與Ｘ光繞射儀(XRD)呈現所成長之RuO2/R-TiO2異質奈米結構，共存著排列整齊且垂直成長的RuO2(001)與呈現出類似V形貌的RuO2(101)於不同收尾狀態的R-TiO2上。成長異質奈米材料於不同介面上所產生的變化，本文將深入探討。

We report the growth of well-aligned densely-packed rutile phase TiO2 (R-TiO2) nanocrystals (NCs) and RuO2/R-TiO2 heteronanostructures on sapphire SA(100), SA(012), and LTO(012) substrates via reactive magnetron sputtering using Ti and Ru metal targets under different conditions. The surface morphology, structural and spectroscopic properties of the as-deposited NCs are characterized using field-emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and micro-Raman spectroscopy.
FESEM micrographs reveal the growth of vertically aligned TiO2 NCs on SA(100), whereas the NCs on the SA(012) and LTO(012) are grown with a tilt angle of ~33 from the normal to substrates. The XRD results show that rutile phase TiO2 NCs with either (001) orientation on SA(100) substrate or (101) orientation on SA(012)/ LTO(012) substrates. A strong substrate effect on the alignment of the TiO2 NCs growth is demonstrated and the probable mechanism for the formation of these NCs is discussed. XPS analyses show an oxygen vs. titanium ratio of 2.0 ± 0.1 for the as-grown TiO2 NCs. Raman spectra of R-TiO2 NCs exhibit a slight redshift in the peak position and a small broadening in linewidth with respect to that of the bulk counterpart.
FESEM micrographs and XRD patterns of RuO2/R-TiO2 heteronanostructures indicate that the growth of coexistence of vertically aligned RuO2(001) and twinned V-shaped RuO2(101) NCs on top of R-TiO2 NCs. The probable mechanisms for the formation of well-aligned RuO2 NCs on top of R-TiO2 NCs are discussed.

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