骨質疏鬆症是一種常見的老人病症，骨質疏鬆的症狀是骨骼會變得脆弱且容易發生骨折。因此，尋找替代人造骨支架的材料非常重要。本論文利用電漿輔助化學氣相沉積(PECVD) 技術，製備含有矽氮之六甲基二矽氮烷 (hexamethyldisilazane, HMDSZ) 薄膜，並使用交替浸泡法 (alternative immersion) 將磷酸鈣 (calcium phosphate, Ca-P) 修飾於電漿聚合之六甲基二矽氮烷薄膜 (plasma polymerization of hexamethyldisilazane, ppHMDSZ) 上。藉由此製程所製備的Ca-P/ppHMDSZ複合材料，可增進欲植入基材的抗腐蝕能力，並促進骨傳導性 (osteoinduction)，有利於成骨細胞 (osteoblast) 增殖於材料上。
　　在製備ppHMDSZ薄膜實驗中，藉由調整電漿沉積時間 (2、5、10、20及30分鐘)，探討薄膜表面的化學及物理性質，除了利用場發射式電子顯微鏡 (FE-SEM) 觀察薄膜表面型態、還利用水接觸角方法測量ppHMDSZ薄膜表面的水潤濕性、藉由全反射傅立葉紅外線轉換光譜儀 (ATR-FTIR) 與化學分析電子能譜儀 (ESCA) 分析薄膜表面的化學官能基及元素組成。同時，利用FE-SEM橫截面分析薄膜的厚度，並探討ppHMDSZ沉積時間與薄膜厚度的關係。在抗腐蝕的實驗中，Tafel 極化曲線顯示，未經修飾的不鏽鋼腐蝕電流密度為1.431 μA/cm2，經過電漿沉積10分鐘ppHMDSZ薄膜修飾的不鏽鋼，腐蝕電流密度下降至0.129 μA/cm2，顯示經ppHMDSZ薄膜修飾後的基材具有較佳的抗腐蝕能力。此外，修飾ppHMDSZ薄膜於矽晶圓片後，相較於未經修飾的矽晶圓片，彈性模數由89.3 ± 6.6 GPa下降至62.3 ± 6.3 GPa，證實ppHMDSZ薄膜的表面修飾有助於降低基材的應力屏蔽效應。
　　利用ppHMDSZ薄膜修飾基材之後，使用交替泡法沉積Ca-P層於ppHMDSZ/基材，以增進 ppHMDSZ/基材 的生物相容性及骨傳導能力。對於沉積之Ca-P層，利用石英晶體微天秤 (QCM) 量測不同交替浸泡次數 (1、2、5與10次) 對於Ca-P層重量變化的影響。實驗結果顯示，Ca-P沉積質量與浸泡的循環次數呈線性關係 (沉積速率：3.080 μg/cm2∙cycle)。X-射線繞射儀 (XRD) 的分析結果顯示，Ca-P層為二水磷酸鈣 (dicalcium phosphate dehydrate, DCPD) 的結晶型。最後，利用老鼠纖維母細胞 (L-929) 進行細胞存活率的實驗結果，顯示L-929細胞在經過循環浸泡2次的 Ca-P/ppHMDSZ/載玻片後，具有最佳的生物相容性及細胞延展性。利用所製備的 Ca-P/ppHMDSZ/載玻片 培養人類成骨細胞 (hFOB1.19) 的細胞存活率實驗，結果顯示Ca-P層有助於提升hFOB1.19細胞增殖及延展性，由此可知本論文所製備的Ca-P/ppHMDSZ複合材料具有做為骨骼植入材料的潛力。

Vertebrate bones and teeth are known to be mainly composed of inorganic calcium phosphate (Ca-P) salts. Because the Ca-P layers possess good biocompatibility, osteoinduction, and osteoconduction properties, this study aims to incorporate the Ca-P layers with good adhesion and functionalities via plasma-enhanced chemical vapor deposition (PECVD) technique. Firstly, plasma-polymerized hexamethyldisilazane (ppHMDSZ) thin films were deposited on the substrates (to form ppHMDSZ/substrate) to be used in the artificial bone-substitute materials to promote the resistance against corrosion. Then, Ca-P is incorporated on ppHMDSZ/substrate via alternative immersion method, where the cycles of immersion were adjusted from 1 to 10 times.
To evaluate the wettability of ppHMDSZ thin films, water contact angle was applied. The thickness of ppHMDSZ was analyzed by the cross-section images taken by field-emission scanning electron microscope (FE-SEM). In order to investigate the chemical and physical properties of the ppHMDSZ thin films, attenuated total reflection Fourier transform infrared spectroscopy (ATR-FTIR) and electron spectroscopy for chemical analysis (ESCA) were applied. With the Tafel polarization curve tests, the corrosion current (1.431 μA/cm2) of the pristine and ppHMDSZ coated stainless steel was measured. The results showed that the corrosion current of ppHMDSZ/stainless steel reduced to 0.129 μA/cm2 after 10 minutes of plasma deposition time. Moreover, the elastic modulus of the deposited ppHMDSZ/Si wafer decreased from 89.3 ± 6.6 GPa to 62.3 ± 6.3 GPa, which shows that ppHMDSZ has the potential to reduce the stress shielding of the substrate.The biocompatibility and osteoconduction of Ca-P modified ppHMDSZ/substrate was also evaluated. The weight of Ca-P was controlled by different immersion cycles (1, 2, 5, and 10) and measured by quartz crystal microbalance (QCM). The results showed a linear relationship between deposition weight and immersion cycles (deposition rate: 3.080 μg/cm2∙cycle). The X-ray diffraction (XRD) spectrum identified that the crystallinity of Ca-P layers was dicalcium phosphate dehydrate (DCPD). Finally, the effects of Ca-P/ppHMDSZ composites on cell viability of mouse fibroblast cells (L-929) and human osteoblast cells (hFOB1.19) were studied. The results showed that Ca-P/ppHMDSZ/glass has the best biocompatibility after two immersion cycles. In addition, the Ca-P layers coated ppHMDSZ/glass revealed higher hFOB1.19 cell density. The Ca-P/ppHMDSZ composites showed the potential in further applications for bone tissue engineering.

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