近幾年光學雷達因車輛自動化與其他感測應用而快速崛起，對此課題的研究日益增加，而全固態式光學雷達在感測器領域裡，具精小、高解析度與掃描範圍大的優勢。再加上矽光子積體電路相較於一般積體電路來說具有低損耗、成本降低等優點，因此，以矽光子實現的固態光學雷達在感測器上已成不可忽視的關鍵技術。
本篇論文著重於量測與分析由比利時微電子研究中心(IMEC)下線64通道的全固態式光學雷達晶片，並進行相位控制以及相位修正。並量測由台積電(TSMC)製造的光學相位陣列晶片。所有量測與相位控制是以自行撰寫的控制程式，搭配本實驗室提出的演算法進行。
在未經相位修正的情況下，64通道IMEC晶片在1550奈米波段入射光下，天線波導方向光束半高寬為0.150 度、天線陣列方向因出現光斑，其遠場光束半高寬為0.465 度；經過相位修正後，天線波導方向光束發散角保持不變為0.150 度，天線陣列方向光束半高寬縮小為0.123 度，且峰瓣位準可達10 dB以上。受限於垂直耦合器的波長範圍限制，天線波導方向掃描範圍為±3.43 度，天線陣列方向則受天線間距限制為±9.66度。
台積電製作的光學相位陣列晶片的天線波導長度只有200微米，因此波導方向光束發散角為0.532 度；而天線陣列方向則因有256條間距為2.2微米的光學天線，其光束發散角為0.163 度。因製程規則及晶片大小限制，無法埋入電極進行相位修正，仍然驗證了以多晶矽塊材製程製作光學雷達的可行性。

In recent years, the optical radars are becoming hot research topics due to the rapidly increasing applications in Advanced Driver. Assistance Systems (ADAS) and various sensing systems. All-solid-state optical radars have the advantages of compactness, high resolution, and large scanning range, along with the merits of low loss and low cost provide by the silicon photonic integrated circuits (SiPIC), the SiPIC based optical radars have become indispensable for sensing applications.
This thesis focuses on the measurement and analysis of 64-channel all-solid-state optical radar chips fabricated by the Interuniversity Microelectronics Centre (IMEC) as well as the optical SiPIC chips fabricated by the Taiwan Semiconductor Manufacturing Co. (TSMC). Phase control and phase correction will also be pursued for the IMEC chips. All measurements and phase control experiments are conducted with self-made control software and algorithm.
For the optical radar chips fabricated by IMEC, the 64-channel optical phase array (OPA) shows a beam divergence angle of 0.150 degrees in the antenna waveguide direction and 0.465 degrees in the antenna array direction when no phase correction is applied. An input laser light of 1550-nm wavelength band is used in the measurement. After phase correction, the beam divergence angle in the waveguide direction remains unchanged, 0.150 degrees, while it is reduced to 0.123 degrees in the array direction. The peak-to-sidelobe level (PSLL) can exceed 10 dB after phase correction. Due to the limitation of the input grating coupler, the beam steering angle along the waveguide direction is ±3.43 degrees, while it can have ±9.66 degrees along the array direction, which is limited by the antenna pitch.
For the optical radar chips fabricated by TSMC, the 256-channel optical phase array (OPA) shows a beam divergence angle of 0.531 degrees in the waveguide direction since the optical antenna is only 200 μm long. The beam divergence angle in the array direction is 0.163 degrees for the 256 optical antennas of 2.2 μm pitch. There is no phase-control electrodes layout on this chip due to the limitation of chip size for the multi-project service, so no phase correction can be conducted. The measured results still very the feasibility of realizing optical radars with the bulk CMOS process provide by TSMC.

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