研究生: |
陳昱丞 Yu-Cheng Chen |
---|---|
論文名稱: |
雙面階層奈米結構元件應用於光學嵌件射出成形異質結合研究 Research of Double-Sided Nanostructures of Insert Molding of Heterogeneous Bonding for Optical Applications |
指導教授: |
陳炤彰
Chao-Chang Chen |
口試委員: |
楊申語
Sen-Yeu Yang 黃國政 Kuo-Cheng Huang 陳士勛 Shih-Hsun Chen 莊程媐 Cheng-Xi Chuang 陳炤彰 Chao-Chang Chen |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2020 |
畢業學年度: | 108 |
語文別: | 中文 |
論文頁數: | 200 |
中文關鍵詞: | 雙面階層陽極氧化孔洞結構 、嵌件射出成形 、超親水性 、異質結合 |
外文關鍵詞: | Anodic Aluminum Oxide (AAO) with double-sided two-stair nano pores, Insert injection molding (IIM), Super hydrophilic, Heterogeneous bonding |
相關次數: | 點閱:169 下載:1 |
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本研究旨為在玻璃基板上製作出雙面階層陽極氧化鋁結構嵌件,利用階層陽極氧化鋁奈米孔洞結構使其一表面具有超親水性,另一表面作為嵌件射出成形製程使玻璃與聚碳酸酯(PC)鏡片異質結合之介質,製作出具有超親水性表面之異質結合平面透鏡及非球面透鏡產品,用作透鏡組最外側之透鏡群。研究方法為預先針對玻璃基板上的陽極氧化鈦及陽極氧化鋁進行實驗與分析,選定陽極氧化鋁製作穩固結合之陽極氧化奈米孔洞結構。接著透過製程參數控制,雙面鍍鋁玻璃分別進行多次陽極氧化處理參數實驗,以三次陽極氧化製程製作之階層奈米孔洞結構,接觸表面積提升10倍,表面與水之接觸角小於10度,經由高溫熱退火(400 ℃)使光穿透衰減由36 %降至14 %,以此參數製作6吋均勻陽極氧化晶圓,進行裁切製備80至90片嵌件。由模流分析(Moldex3D)結果比較,傳統射出成形製程(IM)與射出壓縮成形製程(ICM),結果為IM製程之產品變形量及殘留應力較小;由異質結合強度檢測得知,正向結合強度由0.16 MPa提升至1.84 MPa,側向結合強度由0.03 MPa提升至0.70 MPa;由光穿透率分析結果得知,本研究之雙面階層陽極氧化鋁異質結合產品光穿透率達70 %。未來可應用於複合式塑膠玻璃異質結合光學元件。
This research aims to develop a double-sided two-stair (DSTS) nano pores structure of anodic aluminum oxide (AAO) on glass substrate insert for hybrid optical elements. One side glass substrate surface with nano structure can achieve super hydrophilic, and another side is used as a heterogeneous bonding between glass substrate and Polycarbonate (PC) lens by the insert injection molding (IIM) process. The hybrid lens with super hydrophilic and heterogeneous bonding are fabricated to obtain plano lens and aspherical lens. Both anodic titanium oxide (ATO) and AAO have been tested preliminarily and AAO is selected as DSTS candidate. With double-sided sputtering aluminum on glass substrate, multi-phase anodize process has been performed by control anodizing parameters for increasing the glass substrate surface area as 10 times. The surface energy shows that the contact angle of AAO with two-stair nano pores structure is under 10 degree for super hydrophilic surface. The light attenuation decreased from 36 % to 14 % after thermal annealing at 400 oC after AAO processing. Then, some 6-inch double-sided AAO substrates have been fabricated based on the same parameters. Each 6-inch DSTS AAO wafer can be sliced into 80 to 90 pieces as part insert for heterogeneous bonding by injection molding process. From simulation results of insert injection molding (IIM) by Moldex3D, injection molding (IM) and injection compression molding (ICM) have been compared and the hybrid lens by IM has smaller warpage and residual stress that those by ICM. The tensile strength tests for heterogeneous bonding show that the normal bonding strength increases from 0.16 MPa to 1.84 MPa and lateral bonding strength increases from 0.03 MPa to 0.70 MPa. Finally, the light transmittance of hybrid lens with heterogeneous bonding of DSTS nano pores can attain 70 %. Research results can be applied on outermost of hybrid lens with image sensor.
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