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研究生： 賴姿璇
Tzu-Hsuan Lai
論文名稱： 還原氧化石墨烯/超奈米鑽石複合結構之氫氣感測特性
Reduced Graphene Oxide/ Ultra-nanocrystalline Diamond Hybrid Structure for Hydrogen Sensor
指導教授： 黃柏仁
Bohr-Ran Huang
口試委員: 周賢鎧
Shyan-kay Jou
章詠湟
Yung-Huang Jang
學位類別： 碩士
Master
系所名稱： 電資學院 - 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年： 2018
畢業學年度： 106
語文別： 中文
論文頁數： 111
中文關鍵詞： 超奈米結晶鑽石 、還原氧化石墨烯 、氫氣感測器
外文關鍵詞： nitrogen based ultra-nanocrystalline diamond, diamond gas sensor
相關次數： 點閱：322  下載：1 
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    • 本論文分為兩個部分，第一部分探討以不同時間成長還原氧化石墨烯以及超奈米結晶鑽石的品質，並將其分別製作成氫氣感測元件做分析，且探討還原氧化石墨烯與不同成長時間超奈米鑽石結晶複合結構之氫氣感測特性；第二部分探討不同成長時間之還原氧化石墨烯與超奈米鑽石結晶複合結構之氫氣感測特性，並以FE-SEM、FEG-TEM、AFM、Raman、PL、Gas Sensor等分析判定還原氧化石墨烯與鑽石的特性與品質。

    研究發現，不同成長時間的還原氧化石墨烯經拉曼光譜儀與原子力顯微鏡分析擁有不同的缺陷程度與粗糙度，而得知成長七小時之還原氧化石墨烯擁有最差的品質及粗糙度，但其氫氣感測分析中獲得最佳靈敏度22.11%。在不同成長時間的超奈米鑽石結晶中，依成長時間的不同，擁有不同的晶粒尺寸與成膜性質，而成長五分鐘的超奈米鑽石有較大的比表面積，故其有最佳的靈敏度7.51%。
    將成長七小時的還原氧化石墨烯與成長五分鐘的超奈米結晶鑽石做複合結構，因其有最佳披覆效果與PN接面的產生，故可達到本研究中最大的氣體靈敏度55.90%。

    Gas sensor devices are playing important role among the most essential technologies in our daily life. Generally, gas sensors utilize in the detection of explosive gases and toxic analytes for the purpose of human safety, industrial processes, and observing air quality level. The selective sensing of hazardous and explosive gases with excellent sensitivity is serious problem up to date. Since hydrogen (H2) is future fuel, however, it is unsafe when about 4 vol % in the atmosphere, so it is important to detect with nano material based sensors.

    In this context, we focus on the fabrication of hybrid gas sensors using nanosized diamond material with glucose derived reduced graphene oxide. This study is divided into two parts. The first part, we study the quality of reduced graphene oxide (rGO) and nitrogen based ultra-nanocrystalline diamond (N-UNCD) with different growth time and studied their H2 sensing properties. It is revealed that the rGO prepared with growth time of 7hr, exhibits many defects and better sensing properties (22.11%) compare with other growth time. On the other hand, N-UNCD with growth time of 5 min reveal good sensing (7.51%) than other growth time.

    Finally, we fabricate the hybrid materials using rGO-7hr/N-UNCD-5min for high performance H2 hydrogen sensor. The systematic investigations were revealed that rGO-7hr/N-UNCD-5min based sensor exhibits an ultrahigh sensor response of 55.90%. The rGO-7hr/N-UNCD-5min based sensor was also found to be well-retained with repeatability and long-term stability due to the formation of PN junction. The significant features of this rGO-7hr/N-UNCD-5min based hybrid nanostructure are promising candidate for new generation H2 sensors

    目錄 中文摘要..........Ⅰ 英文摘要.........Ⅱ 致謝.............Ⅲ 目錄.............Ⅳ 圖目錄...........Ⅶ 表目錄...........Ⅺ 第一章 緒論...............1 1.1 前言...............1 1.2 研究動機...............3 第二章 文獻回顧...............4 2.1還原氧化石墨烯的特性簡介...............4 2.1.1 還原氧化石墨烯的結構與性質...............4 2.1.2 還原氧化石墨烯的特性...............5 2.1.3 氧化石墨烯的還原方法...............6 2.2 鑽石薄膜之特性簡介...............7 2.2.1 鑽石薄膜簡介...............7 2.2.2 結晶鑽石成長機制...............9 2.3 氣體感測器機制與種類...............13 2.3.1電化學型氣體感測器...............13 2.3.2紅外線感測型氣體感測器...............15 2.3.3觸媒燃燒型氣體感測器...............15 2.3.4金屬氧化物半導體型氣體感測器...............16 2.4 還原氧化石墨烯氣體感測器...............18 第三章 實驗方法...............22 3.1 實驗設計與流程...............22 3.2 製備之材料介紹...............25 3.3 基板清洗...............26 3.4 水熱法(Hydrothermal method)成長還原氧化石墨烯...............27 3.5 微波電漿化學氣相沉積法成長奈米結晶鑽石...............28 3.6 氣體感測元件製作...............30 3.7 儀器設備與材料分析方法...............31 3.7.1 場發射掃描式電子顯微鏡(FE-SEM)...............31 3.7.2 場發射槍穿透式電子顯微鏡(FEG-TEM)...............32 3.7.3 原子力顯微鏡(Atomic Force Microscope，AFM)...............33 3.7.4 拉曼光譜儀(Raman spectrum)...............33 3.7.5 光激發螢光光譜儀(Photoluminescence，PL)...............34 3.7.6 氣體感測器(Gas sensor)...............35 第四章 還原氧化石墨烯(rGO-7)/超奈米鑽石複合結構之氫氣感測特性...............36 4.1還原氧化石墨烯特性分析...............36 4.1.1 表面型態分析...............36 4.1.2 拉曼光譜儀分析...............40 4.1.3 還原氧化石墨烯之氫氣感測分析...............42 4.2 超奈米鑽石特性分析...............44 4.2.1 表面型態分析...............44 4.2.2 拉曼光譜儀分析...............47 4.2.3 光激發螢光頻譜儀分析...............48 4.2.4 超奈米鑽石之氫氣感測分析...............51 4.3 還原氧化石墨烯(rGO-7)/超奈米鑽石複合結構之特性分析...............53 4.3.1 表面型態分析...............53 4.3.2 拉曼光譜儀分析...............59 4.3.3 光激發螢光頻譜儀分析...............60 4.3.4 還原氧化石墨烯(rGO-7)/超奈米鑽石複合結構之氫氣感測分析...............62 第五章 還原氧化石墨烯/超奈米鑽石(ND-5)複合結構之氫氣感測特性...............69 5.1 還原氧化石墨烯/超奈米鑽石(ND-5)複合結構之特性分析...............69 5.1.1 表面型態分析...............69 5.1.2 拉曼光譜儀分析...............76 5.1.3 光激發螢光頻譜儀分析...............78 5.1.4 還原氧化石墨烯/超奈米鑽石(ND-5)複合結構之氫氣感測分析...............80 第六章 結論與未來展望...............89 6.1 結論...............89 6.2 未來展望...............91 參考文獻...............93

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