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研究生: 張官清
Alfred Albert
論文名稱: Fabrication of 45°Mirror Coupling Polymer Waveguides for Short-Link Optical Interconnect Applications
Fabrication of 45°Mirror Coupling Polymer Waveguides for Short-Link Optical Interconnect Applications
指導教授: 李三良
San-Liang Lee
口試委員: 蘇忠傑
Su, Jung-Chieh 
洪勇智
Yung-Jr Hung
學位類別: 碩士
Master
系所名稱: 電資學院 - 電子工程系
Department of Electronic and Computer Engineering
論文出版年: 2018
畢業學年度: 106
語文別: 英文
論文頁數: 76
中文關鍵詞: Polymer WaveguideOptical InterconnectSU-8Polymer
外文關鍵詞: Polymer Waveguide, Optical Interconnect, SU-8, Polymer
相關次數: 點閱:205下載:4
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The applications of optical solution as long-link interconnect formed the backbone of data transfer system in the past decades. However, the implementation of this solution in the short-link interconnects still has some obstacles including higher production cost and complex integration. This obstacle needs to be solved as an electrical interconnect application has reached the limit in data speed and needed a replacement technology immediately. The use of polymer for optical waveguide material is believed to reduce the production cost while maintaining the performance. The polymer waveguide combined with the 45° mirror coupler can provide a more straightforward integration process. In this study, a low-cost SU-8 polymer waveguide combines with NOA-61 as waveguide cladding show a decent performance with a propagation loss of 0.75 dB and excess loss of 2.616 dB. Mirror coupling loss is also measured at 1.496 dB average for all channel. The fabricated waveguide is confirmed to successfully transmit light signal at a speed of 2.5 Gb/s per channel.


The applications of optical solution as long-link interconnect formed the backbone of data transfer system in the past decades. However, the implementation of this solution in the short-link interconnects still has some obstacles including higher production cost and complex integration. This obstacle needs to be solved as an electrical interconnect application has reached the limit in data speed and needed a replacement technology immediately. The use of polymer for optical waveguide material is believed to reduce the production cost while maintaining the performance. The polymer waveguide combined with the 45° mirror coupler can provide a more straightforward integration process. In this study, a low-cost SU-8 polymer waveguide combines with NOA-61 as waveguide cladding show a decent performance with a propagation loss of 0.75 dB and excess loss of 2.616 dB. Mirror coupling loss is also measured at 1.496 dB average for all channel. The fabricated waveguide is confirmed to successfully transmit light signal at a speed of 2.5 Gb/s per channel.

Recommendation Letter ii Abstract iii Acknowledgements iv Contents v List of Figures vii List of Tables ix Chapter 1 Introduction 1 1.1 Background 1 1.2 Optical Interconnect and Technology 5 1.3 Objective 7 Chapter 2 Studies of Polymer Waveguide 9 2.1 Waveguide Geometry 9 2.2 Ray tracing 10 2.3 Electromagnetic Theory 12 2.4 Insertion Loss 15 Chapter 3 Literature Review 18 3.1 Material Selection of Waveguide 18 3.2 Waveguide Structure and Fabrication 22 3.3 Coupling Mechanism 24 3.4 Summary 27 Chapter 4 Waveguide Simulation 29 4.1 Ray Tracing 29 4.2 2.5D FDTD Simulation 32 Chapter 5 Waveguide Fabrication 35 5.1 Waveguide Material 35 5.2 Waveguide Fabrication 38 5.2.1 Photomask 38 5.2.2 Coating and Photolithography Process 40 5.3 45° Mirror Fabrication 48 Chapter 6 Experiment and Result 51 6.1 Measurement Result 51 6.1.1 Waveguide Propagation Loss 51 6.1.2 Mirror Coupling Loss 56 6.1.3 Eye Diagram Measurement 57 Chapter 7 Conclusion 61 7.1 Conclusion 61 7.2 Future Work 62 References 64

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