摘要
因能源危機使大家投入太陽能電池的研究與發展，目前化合物薄膜太陽能電池以銅銦鎵硒為主，由於成本高昂，因而發展出硒化銅錫鋅與硫化銅錫鋅兩種化合物太陽能電池，除了成本考量，也因錫、鋅含量豐富且能隙值分別為0.9 eV及1.5 eV，適合拿來作替換的材料。
本次實驗利用自製的金屬靶濺鍍製備Cu-Zn-Sn (CZT)薄膜及以 (Cu-ZnS-Sn) 陶金靶濺鍍製備Cu-ZnS-Sn陶金薄膜，進行硒化和硒硫化反應，製備硒化銅錫鋅與硒硫化銅錫鋅太陽能電池 ，並探討不同的硒碇及硒硫碇在不同的硒化與硒硫化反應溫度對薄膜特性之影響，並且透過FE-SEM、XRD、EDS與霍爾電特性量測來分析薄膜物理性質。將實驗結果較佳參數所得的吸收層製備成薄膜太陽能電池元件，其構造為Ag/ITO(RF)/i-ZnO(RF)/CdS(CBD)/Cu2ZnSnSe4或Cu2ZnSn(S,Se)4薄膜/Mo(DC)/Al2O3，再利用擬太陽能光測試儀器測試其電池之轉換效率。
經過實驗結果顯示，使用【雙碇】進行兩階段硒化和硒硫化反應的方式(第一階段300 ℃，第二階段600 ℃)所製備之薄膜性質其晶粒最佳其尺寸約為2 μm~5 μm，而由XRD及EDS都可以證明此薄膜為黃錫礦結構並有Cu0.8Zn0.5Sn0.5Se2、Cu0.8Zn0.5Sn0.5(S,Se)2組成比例。將此參數製備元件，分別量測出0.58%及0.45%的光電轉換效率。

Abstract
Due to energy crisis, the research of solar cells is much more attractive. One of the main compound solar cells is the Cu(In,Ga)Se2 system but its higher cost has made Cu2ZnSnSe4 (CZTSe) and Cu2ZnSnS4(CZTS) with energy band gaps of 0.9 eV and 1.5 eV, respectively, attractive for thin-film solar cells.
In this study, CZTSe and CZTSSe thin film solar cells were prepared on the molybdenum-coated soda lime glass (SLG) substrates. The effects of selenization conditions using Se- and (Se+S)-containing discs and reaction temperature on the performance of sputtered CZT and Cu-ZnS-Sn thin film were evaluated. The CZTSe and CZTSSe solar cell was constituted with the stacking sequence of Ag/ITO/ZnO/CdS/ CZTSe or CZTSSe/Mo/SLG. The quality of the absorption layer was analyzed by X-ray diffractometer and field-emission scanning electron microscope equipped with energy dispersive X-ray spectrometer. The performance of the solar cells was evaluated under the standard AM1.5 illumination.
The experimental results showed that the best condition for the CZTSe and CZTSSe thin film was obtained by selenization at 600 oC with a two-step process and with double discs. The CZTSe and CZTSSe films were dense and had the desired composition, good crystallinity, and the grain size of 3-5 μm. The stacked solar cells displayed the power conversion efficiencies of 0.58% and 0.45% for the cells with the CZTSe and CZTSSe absorption layers, respectively.

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