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研究生: 蔡宇智
Yu-Chih Cai
論文名稱: 應用於風機過濾機組之智慧監控系統研究
Research on Intelligent Monitoring System Applied to Fan Filter Unit
指導教授: 蕭鈞毓
Jyun-Yu Siao
蘇順豐
Shun-Fong Su
口試委員: 楊念哲
Nian-Jhe Yang
王順源
Shun-Yuan Wang
謝秀明
Siou-Ming Sie
蕭弘清
Hong-Cing Siao
學位類別: 碩士
Master
系所名稱: 電資學院 - 電機工程系
Department of Electrical Engineering
論文出版年: 2022
畢業學年度: 110
語文別: 中文
論文頁數: 169
中文關鍵詞: 風機過濾機組人機介面三軸加速度感測器電機控制
外文關鍵詞: Fan Filter Unit, Human Machine Interface, Three-axis Acceleration Sensor, Motor Control
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有鑑於目前高科技廠房中無塵室所使用空氣清淨設備之風機過濾網機組於濾網堵塞時,需透過人工方式進行量測各個風機過濾機組出風速度或出風量,並根據即時運行情況調整最佳風扇轉速,以保持潔淨室環境的清潔度,從而浪費維護時間和成本,由此,本研究主要目的為開發風機過濾機組之監控與自動驅動系統。
於硬體電路上亦添加三軸加速度感測器,有別於目前市面上所販售之機組無運轉振動的自動監控系統,須由人工判斷或定期檢測是否有振動異音,以上將會提高人事成本,因此透過此加速感測器更能掌握風機過濾系統整體的振動受力狀況,進而提早預防風機損壞及施以預測性維護和故障預防措施,避免設備意外停機、延長設備使用壽命同時降低設備維護成本。
在驅動控制系統的基礎上,再加以開發專屬於風機過濾機組之智慧監控系統,透過此監控系統能實時監控風機過濾機組的電流,而在驅控系統與監控系統之間的傳輸格式為利用Modbus RTU傳輸協議做為發想,定義了新的傳輸格式,以便在本研究中完成驅控系統與監控系統之間的傳輸要求與多台聯控之功能。在人機介面上,亦設計了完整的使用者登入系統、單機控制介面、區域聯控介面及說明介面,故本研究所開發之驅控系統及智慧監控系統具有高度的實用性與經濟性。


In view of the fact that the air filter units in clean rooms in high-tech factories need to be measured manually for each fan filter unit when the filters are clogged, and the optimal fan speed is adjusted according to the immediate operation conditions to maintain the cleanliness of the clean room environment, thus wasting maintenance time and costs. The main objective of this study is to develop the monitoring and automatic driving system for fan filter units.
The three-axis acceleration sensor has been added to the hardware circuit, which is different from the automatic monitoring and control system sold in the market without operation vibration, which requires manual judgment or regular detection of vibration noise, which will increase the personnel cost, therefore, the acceleration sensor can grasp the overall vibration force condition of the fan filtering system, so as to prevent damage to the fan and apply early Therefore, through the accelerometer, we can grasp the overall vibration condition of the fan filtration system, prevent fan damage and implement predictive maintenance and fault prevention measures to avoid accidental equipment shutdown, extend equipment lifetime meanwhile reduce equipment maintenance costs.
Based on the drive control system, we also developed the intelligent monitoring system exclusively for the fan filtration unit, through which the monitoring system can monitor the current of the fan filtration unit in real time, and the transmission format between the drive control system and the monitoring system is based on the Modbus RTU transmission protocol, and a new transmission format is defined to complete the transmission between the drive control system and the monitoring system in this study. In this study, the transmission between the drive control system and the monitoring system is completed. In terms of human-machine interface, a complete user login system, a stand-alone control interface, a regional joint control interface and an explanation interface are designed also, so the drive control system and the intelligent monitoring system developed in this study are highly practical and economical.

摘要 I Abstract II 致謝 IV 目錄 V 圖目錄 VIII 表目錄 XV 第一章 緒論 1 1.1 研究動機 1 1.2 相關文獻回顧 4 1.3 研究流程與章節架構 13 第二章 三相永磁同步電動機 16 2.1 前言 16 2.2 三相永磁同步電動機之機械結構與相關特性 16 2.3 三相永磁同步電動機之數學模型 21 2.3.1 三相永磁同步電動機數學模型 21 2.3.2 三相永磁同步電動機座標軸轉換 25 2.4 本章結語 30 第三章 風機過濾機組驅動與控制系統 31 3.1 前言 31 3.2 電機驅動晶片介紹 32 3.2.1 晶片規格介紹 32 3.2.2 內部控制策略 33 3.2.3 變頻器原理 33 3.2.4 空間向量脈波寬度調變 35 3.3 無感測器三相永磁同步電機之控制器 43 3.4 風機馬達自動調速說明 46 3.5 風機過濾機組驅控系統之硬體架構 48 3.5.1 微控制器晶片PIC16F19176規格 49 3.5.2 風機馬達規格 50 3.5.3 風機過濾機組實體 52 3.5.4 電路整合驅控板 53 3.6 風機過濾機組驅控系統之軟體設計 54 3.6.1 電機控制晶片IMM101T-056M程式設計 56 3.6.2 微控制器PIC16F19176程式設計 59 3.7 本章結語 68 第四章 感測器選用-三軸加速度計 69 4.1 前言 69 4.2 三軸加速計介紹 69 4.2.1 三軸加速度計規格 70 4.2.2 KX122-1037晶片腳位介紹 72 4.3 通訊傳輸模式介紹 73 4.3.1 I²C基本定義介紹 73 4.3.2 主從傳輸模式 75 4.4 三軸加速度計感測原理 78 4.5 本章結語 79 第五章 風機過濾機組監控系統 80 5.1 前言 80 5.2 通訊接口標準介紹 80 5.3 RS-485收發器 82 5.4 Modbus應用協議 84 5.4.1 RTU模式 87 5.4.2 TCP/IP模式 88 5.4.3 ASCII模式 90 5.5 監控系統通訊方式 91 5.5.1 通用非同步收發器 91 5.5.2 通用序列匯流排 93 5.6 硬體選用-訊號轉換器 95 5.7 人機介面系統開發 97 5.7.1 人機介面設計環境 97 5.7.2 通訊格式定義 97 5.7.3 介面設計與功能說明 102 5.8 本章結語 107 第六章 實驗結果與討論 108 6.1 前言 108 6.2 實機測試方式與結果呈現 108 6.2.1 實測方式 108 6.2.2 功能驗證 111 6.3 本章結語 141 第七章 結論與未來研究方向 142 7.1 結論 142 7.2 未來研究方向 143 參考文獻 144

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