表面工程的延新促進了高熵材料的使用，因為它們具有卓越的品質，包括良好的耐腐蝕性、高硬度、抗氧化性和改善的熱穩定性；然而，塗層的性能與製程條件息息相關，為了更好地了解高熵合金 (HEA) 的生長機制和成分變化，可以使用高功率脈衝磁控濺射 (HiPIMS) 和射頻磁控濺射技術來合成高熵合金薄膜。本研究探討Al0.5CoCrFeNi2Ti0.5 高熵合金粉末及薄膜性質。
霧化後的Al0.5CoCrFeNi2Ti0.5 HEA粉體呈球形且合金元素均勻分布於基底中，晶體結構隨著粒徑的增加，由BCC相轉變為FCC相，其中粒徑從數微米到120微米以上不等。此外，透過退火處理研究了溫度對亞穩態合金粉末之微觀結構的影響，研究指出該結構在 300 ºC 以上和高達 500 ºC 的溫度下保持初始 BCC 相，但沿 (110) 平面排列的晶粒尺寸隨溫度上升而減小，然而當溫度達900 ºC 以上時，FCC 相成為主要結構，期間過渡 sigma 相在 700 和 800 ºC 之間沉澱。根據 EBSD 和EDS Mapping鑑定得知FCC 基質富含 (Fe, Cr) ，而 BCC 沉澱物富含 (Al, Ti) ，且因 Ti的添加所引起的強化效果使硬度增加了 20% 以上。
此外，將Al0.5CoCrFeNi2Ti0.5合金粉末燒結成靶材，並分別利用 HiPIMS 和射頻磁控濺射製備薄膜。XRD分析結果表明塗層具有 FCC 結構，以 (111) 為優選結晶方向，並且它們的表面從顆粒形貌轉變為平整的微觀結構。透過 FWHM 和 AFM 分析，微晶尺寸和表面粗糙度分別降低到 13.27 和 1.33 nm。HiPIMS 濺射樣品具有最高的硬度，這表明沉積功率、壓力和技術極大地影響了所得薄膜，降低沉積壓力和功率有助於產生高質量的塗層，在抗腐蝕能力上亦具有優於 SS 304 基材的表現。
後續更進一步將HiPIMS製備之合金薄膜進行氮化，氮氣和氬氣流速範圍為 0 到 30 sccm，隨著氮氣流速的增加，薄膜的結晶度從純 FCC 結構轉變為部分和完全非晶相。其中，在 15 sccm 的氮氣流量下，EDS 檢測到薄膜中最高的氮原子重量濃度為 10.35%，而在 12 sccm 的流量下，薄膜的硬度最高。氮的添加改善了 HEA 薄膜的特性，以 12 sccm 的流速沉積具有最佳性能。通過這種方式，氮氣流量變化可以作為控制Al0.5CoCrFeNi2Ti0.5 高熵合金薄膜微觀結構和物理性能的有效工具，拓展其應用範疇。
本研究表明以HiPIMS 和射頻磁控濺射技術製備之Al0.5CoCrFeNi2Ti0.5 薄膜，具備塗層性能的控制效果，增加了高熵合金在極端環境中的潛在用途。

Recent advances in surface engineering have boosted the usage of high-entropy materials due to their exceptional qualities, which include good corrosion, high hardness, oxidation resistance, and improved thermal stability. However, the characteristics of the resulting coatings are heavily reliant on the process conditions. To better understand the growth mechanism and composition variation of high entropy alloys (HEAs), high power impulse magnetron sputtering (HiPIMS) and RF magnetron sputtering techniques can be employed to synthesize HEA-based thin-film coatings. This study explores the synthesis of Al0.5CoCrFeNi2Ti0.5 HEA powders and thin-film coatings deposited onto selected substrates from a stoichiometric Al0.5CoCrFeNi2Ti0.5 HEA target.
The as-atomized Al0.5CoCrFeNi2Ti0.5 HEA powders were spherical, with uniform element distribution, and changed phase from BCC to FCC, with particle sizes ranging from several to 120 µm. The influence of temperature on the microstructure of metastable HEA powders was investigated using annealing treatments. As the temperature increased, the structure maintained a primary BCC phase above 300 and up to 500 ºC grains arranged along the (110) plane decreased in size, and the FCC phase became dominant over 900 ºC, with transitional sigma phases precipitating between 700 and 800 ºC. The FCC matrix was (Fe, Cr)-rich, and the BCC precipitate was (Al, Ti)-rich, according to EBSD and elemental mappings. Because of the strengthening impact of solid solution and precipitation induced by Ti addition, the hardness of Al0.5CoCrFeNi2Ti0.5 HEA increased by more than 20% after annealing.
Additionally, HEA powders of Al0.5CoCrFeNi2Ti0.5 were sintered into a target and used for sputtering different thin-film coatings via HiPIMS and RF magnetron sputtering. In the HiPIMS and RF magnetron sputtering thin-film processes, the results indicated the surfaces of HEA thin-film coatings transitioned from nodular to fine microstructures and had an FCC structure with a preferred orientation of (111). Crystallite sizes and surface roughness were reduced to 13.27 nm and 1.33 nm, respectively, based on AFM and FWHM analyses, indicating that the size distribution and crystallites are affected by deposition factors, which impact coating qualities. Lowering deposition pressures and power aided in producing high-quality coatings, and HiPIMS sputtered sample had the highest hardness signifying that the deposition power, pressure, and technique greatly influenced the resultant films. Additionally, the Al0.5CoCrFeNi2Ti0.5 HEA coatings enhanced the anticorrosion properties of the SS 304 substrate.
The final section of the study concentrated on the deposition of Al0.5CoCrFeNi2Ti0.5 high-entropy nitride thin-film coatings via HiPIMS with nitrogen and argon flow rates ranging from 0 to 30 sccm. With the increase in nitrogen flow rate, the structures of films changed from pure FCC structure to partially and completely amorphous phases. Furthermore, at 15 and 12 sccm nitrogen flow rates, the film was found to have the highest nitrogen atomic weight concentration of 10.35% and the highest hardness, respectively. Notably, nitrogen flow rate variation can control Al0.5CoCrFeNi2Ti0.5 HEA films' microstructure and physical properties, enabling them to be tuned, making them suitable as marine surface protective coatings.
In conclusion, characteristics of Al0.5CoCrFeNi2Ti0.5 HEA thin-film coatings can be tuned better by HiPIMS and RF magnetron sputtering, enhancing their suitability for usage in severe conditions

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