本研究以熱蒸鍍方式在矽(100)基板上成長鐵之奈米結構，分別以蒸鍍源溫度、通氬氣壓力、蒸鍍時間作為製程參數。利用XRD進行試片結構分析、SEM觀察表面形態、EDS作元素分析及VSM觀測樣品磁性質。
在蒸鍍源溫度為890℃時，通氬氣壓力4.8×10-1torr，蒸鍍時間為40分下的樣品，表面會形成鐵島嶼狀結構。於通氬壓力6.6×10-1torr與4.8×10-1torr下，於樣品表面上鐵膜可製作出鐵奈米棒，其直徑約為50奈米，長度約為250奈米。若將通氬壓力6.6×10-1torr與4.8×10-1torr樣品作比較，可知通氬氣的量較多，會使奈米棒形成的面積及數量較多。在垂直方向的磁滯曲線的量測顯示，具有奈米棒的樣品有較大的滯後現象，但其磁的易軸仍在膜面上，並具有較大的矯頑場，由此可知鐵的奈米棒狀物確實是成長在鐵膜上，並對其磁性質產生一定之影響。另外，亦發現若矽(100)基板有較佳之冷卻，則較易
形成奈米棒，故基板的冷卻有助於奈米棒之生長。

Utilizing thermal evaporation methods, we founed Fe films and nanostructures were fabricated on Si(100) substrates. The source temperature (Ts), growth pressure (Pg) and growth time (tg) were the experimental parameters in this study. After deposition the Fe samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), and vibrating-sample magnetometer (VSM).
Iron nanoislands form on the Si surface under the condition, at Ts= 890oC, Pg= 4.8×10-1torr, and tg= 40 mins. The iron nanorods could be obtained under the pressure of 6.6×10-1 and 4.8×10-1 torr. The average diameter and the length of iron nanorods were 40 nm and 250 nm, respectively. In addition, the density of iron nanorods increased wich increasing the growth pressure or lowering the substrate temperature. The VSM measurements shows that the samples with iron nanorods have a better hysteresis behavior while applying an external magnetic field perpendicular to the film plane. Therefore, the iron nanorods indeed play an important role on the magnetic properties of iron samples.

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