研究生: |
林道明 Tao-ming Lin |
---|---|
論文名稱: |
面板陣列廠蝕刻區自動化物料搬運系統之模擬分析 Simulation Analysis for Automated Material Handling System in the Etching Area of Panel Array Process |
指導教授: |
王福琨
Fu-kwun Wang |
口試委員: |
郭伯勳
Po-hsun Kuo 陳欽雨 Chin-yeu Chen |
學位類別: |
碩士 Master |
系所名稱: |
管理學院 - 工業管理系 Department of Industrial Management |
論文出版年: | 2010 |
畢業學年度: | 98 |
語文別: | 中文 |
論文頁數: | 72 |
中文關鍵詞: | 面板陣列廠 、自動化物料搬運系統 、系統模擬 、eM-Plant |
外文關鍵詞: | Panel array factory, Automated Material Handling System (AMHS), System simulation, eM-Plant |
相關次數: | 點閱:389 下載:0 |
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面板廠為了達到最具經濟效益的切割,玻璃基板往大尺寸發展是未來之趨勢,然而面板尺寸增加伴隨重量也變大,不論在機台設計或載具搬運上都受此影響,玻璃基板的搬運形成一個重要課題。由於人工搬運已無法負擔工作需求,因此物料搬運一般是藉由自動化物料搬運系統(Automated Material Handling System)來完成,自動化搬運對於平面顯示器產業之量產技術相形關鍵。
本研究以國內某面板陣列廠蝕刻製程之自動化物料搬運系統作為研究對象,針對現有廠房佈置與機台設施規劃,找出最適當之Hand Off區域,使得整體搬運系統績效最佳化。先以UML(Unified Modeling Language)為基礎之物件導向,作為模擬模式發展之主要工具,利用eM-Plant模擬軟體進行模擬模式建構,藉由系統模擬的方式輔助規劃STKT Hand-Off的區域選定,並加入派車法則作為影響搬運績效的考量因素。
模擬數據經實驗設計分析顯示,Hand Off區域位置與卡匣來到率為影響搬運系統績效的主要因子;而對CraneB利用率與卡匣平均流程時間之總和兩項績效指標而言,派車法則、Hand Off區域位置與卡匣來到率三個因子,兩兩之間存在著顯著交互作用。因此,本研究在不同環境下,探討不同Hand-Off位置的選定對搬運系統所造成的影響,透過系統模擬的回饋特性,規劃出一個合理的Hand-Off區域位址與派車法則,可有效平衡STKT內兩台Crane的利用率和縮短卡匣的加工流程時間;並利用中央合成設計法則(Central Composite Design Method),在搬運績效極值化的前提下,配置出STKT Crane搬運系統各項績效之迴歸模型,透過此評估方法,作為探討在不同環境下,預測不同Hand-Off設置區域對STKT Crane搬運系統之績效表現。
In order to get higher economic benefits, panel manufacturers are apt to make large-size glass substrates and by far it becomes a future tendency. Nevertheless, panel’s weight grows with its size and has affected bench design and transport carriers. Since transporting large-size glass substrates by manual handling can not meet the needs, this heavy task is now accomplished by an Automated Material Handling System (AMHS).
The research object is to study an AMHS handling etching processes in an array panel manufacturer located in Taiwan. For the existing plant layout and machine facilities planning, identify the most appropriate Hand Off area and make the best of the overall transportation system performance. Object-oriented based Unified Modeling Language (UML) simulation models (eM-Plant) are applied. The simulation system assists planning STKT Hand-Off locations, and adds the dispatching rule as the impact of handling performance considerations.
The result shows that crane transport system in STKT, Hand-Off area address and the coming rate of cassettes are the main factors to influence transportation system performance. Here are the two performance indicators, CraneB Utilization and Sum of Average Flow Time, there is significant interaction between dispatching rule, Hand-Off area address and the arrival rate of cassettes. Thus this study probes into different Hand-Off area selection in different environments to find out influences that the system causes, and by the feedback feature of the simulation system, the rational Hand-Off area address and dispatching rule can be created to effectively balance the utilization of the STKT crane transport system and reduce the processing cycle time. On the premise of extreme transport performance, using Central Composite Design Method to dispose STKT Crane model on each performance of the transport system, and through this assess method to predict the systematic performance of STKT Crane transport system in different Hand-Off area addresses under different environments.
中文部份
台灣經濟研究院產經資料庫,http://tie.tier.org.tw/tie/index.jsp。
台灣DisplaySearch資訊網,http://www.displaysearch.com.tw/。
呂博裕、王福琨,「晶圓製造廠自動化物料搬運與儲存系統之模擬分析」,工業工程學刊,第十六卷,第二期,第183-194頁 (1999)。
林則孟,系統模擬理論與應用,滄海書局,台北 (2001)。
周上傑,「晶圓廠自動化物料搬運系統之派車模擬研究」,碩士論文,國立清華大學,新竹 (1999)。
姜林杰佑、張逸輝、陳家明、黃佳祚編譯,系統模擬eM-Plant(SiMPLE++)操作與實務,華泰文化事業公司,台北 (2001)。
洪世章,「台灣薄膜電晶體液晶顯示器工業的興起」,清華大學科管所教學個案,2002。
郭曜賑,「UML為基礎之物件導向模擬模式發展程序方法論-晶圓廠自動物料搬運系統為例」,碩士論文,國立清華大學,新竹 (1999)。
陳紹偉,「12吋IC代工廠自動化物料搬運系統之系統模擬與派工法則的研究」,碩士論文,國立台灣大學,台北 (1999)。
黃柏堅,「液晶面板廠機台與無人搬運車指派機制之設計」,碩士論文,國立交通大學,新竹 (2003)。
游欽宏,「半導體與平面顯示器製造自動化技術」,機械月刊,第三十一卷,第十二期 (2005)。
經濟部技術處,「我國彩色濾光片產業專題調查」,工業技術研究院產業經濟與資訊服務中心( ITRIEK-0267-S439(90) ),台北,台灣 (2001)。
顏柄榮,「半導體晶圓廠自動化物料搬運系統之模擬分析」,碩士論文,國立清華大學,新竹 (2000)。
英文部分
Cardarelli, G., and Marcello, P. M., “Simulation Tool for Design and Management Optimization of Automated Interbay Material Handling and Storage Systems for Large Wafer Fab,” IEEE Transactions on Semiconductor Manufacturing, Vol.8, No. 1, pp. 44-49 (1995)
Cardarelli, G., Marcello, P. M., and Granito, A., “Performance Analysis of Automated Interbay Material Handling and Storage Systems for Large Wafer Fab,” Robotics and Computer-Integrated Manufacturing, Vol.12, No. 3, pp. 227-234 (1996)
Egbelu, P. J., and Tanchoco, J. M. A., “Characterization of Automatic Guided Vehicle Dispatching Rules,” International Journal of Production Research, Vol.22, No. 3, pp. 359-374 (1984)
Ganesharajah, T., Hall, N. G., and Sriskandarajah, C., “Design and Operational Issues in AGV-Served Manufacturing Systems,” Annal of Operations Research, Vol.76, No. 1, pp. 109-154 (1998)
Garry, A. K., “Automatic Guided Vehicle Systems:Application, Controls and Planning,” Material Flow, Vol.4, No. 1, pp. 3-16 (1987)
Hwang, H., and Kim, S. H., “Development of Dispatching Rules for Automated Guided Vehicle Systems,” Journal of Manufacturing System, Vol.17, No. 2, pp. 137-143 (1998)
Jang, J., Suh, J., and Ferreira, P. M., “An AGV Routing Policy Reflecting The Current and Future State of Semiconductor and LCD Production,” Journal of Production Research, Vol.39, No. 17, pp. 3901-3921 (2001)
Jang, Y. J., and Choi, G., “Introduction to Automated Material Handling System in LCD Panel Production Lines,” IEEE International Conference on Automation Science and Engineering, Shanghai, China, PP. 223-229 (2006)
Kim, S. H., and Hwang, H., “An Adaptive Dispatching Algorithm for Automated Guided Vehicles Based on An Evolutionary Process,” International Journal of Production Economics, Vol.60-61, No. 1, pp. 465-472 (1999)
Klein, C. M., and Kim, J., “AGV Dispatching,” International Journal of Production Research, Vol.34, No. 1, pp. 95-110 (1996)
Kong, S. H., “Two-Step Simulation Method for Automatic Material Handling System of Semiconductor Fab,” Robotics and Computer-Integrated Manufacturing 23, pp. 409-420 (2007)
Kurosaki, R., Nagao, N., Komada, H., Watanable, Y., and Yano, H., “AMHS for 300mm Wafer,” IEEE International Symposium on Semiconductor Manufacturing Conference, pp. D13-D16 (1997)
Mackulak, G. T., Lawrence, F. P., and Rayter J., “Simulation Analysis of 300mm Intrabay Automation Vehicle Capacity Alternatives,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 445-450 (1998)
Meller, R. D., “The Multi-bay Manufacturing Facility Layout Problem,” International Journal of Production Research, Vol.35, No. 5, pp. 1229-1237 (1997)
Pierce, N. G., and Stafford R., “Modeling and Simulation of Material Handling for Semiconductor Wafer Fabrication,” Proceedings of the 1994 Winter Simulation Conference, pp. 900-906 (1994)
Prasad, K., and Rangaswami, M., “Analysis of Different AGV Control Systems in An Integrated IC Manufacturing Facility, Using Computer Simulation,” Production of the 1988 Winter Simulation Conference, pp. 568-574 (1988)
Wang, F. K., and Lin, J. T., “Performance Evaluation of An Automated Material Handling System for A Wafer Fab,” Robotics and Computer-Integrated Manufacturing, Vol.20, No. 2, pp. 91-100 (2004)
Weiss, M., “300mm Fab Automation Technology Options and Selection Criteria,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, pp. 373-379 (1997)
Weiss, M., “New Twists on 300mm Fab Design and Layout,” Semiconductor International, Vol.22, No. 8, pp. 103-4, 106, 108 (1999)
Yang, T. H., Lin, L. R., Hsu, K. H., and Chen, T., “Implementation Experience of Automated Guided Vehicle System in An IC Foundry Fab Around SMIF Environment,” Semiconductor Manufacturing Technology Workshop, pp. 182-186 (1998)
Yim, D. S., and Linn, R. J., “Push and Pull Rules for Dispatching Automated Guided Vehicles in A Flexible Manufacturing System”, Internal Journal of Production Research, Vol.31, No. 1, pp. 43-57 (1993)