研究生: |
李梓豪 Tzu-Hao Li |
---|---|
論文名稱: |
交叉多角度單顆鑽石修整軟韌彈性墊之研究 Study on Multi-Angle Cross Dressing on Elastomer Pad by Single Diamond Tools |
指導教授: |
陳炤彰
Chao-Chang Chen |
口試委員: |
廖運炫
Yunn-Shiuan Liao 劉顯光 Hsien-Kuang Liu 趙崇禮 Choung-Lii Chao 郭俊良 Chun-Liang Kuo |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2018 |
畢業學年度: | 106 |
語文別: | 中文 |
論文頁數: | 126 |
中文關鍵詞: | 化學機械平坦化 、鑽石修整器 、三維犁削比 、多角度交叉修整 |
外文關鍵詞: | Chemical Mechanical Polishing/Planarization, Diamond Dressing, 3D Plowing Ratio, Multi-Angle Cross-Dressing |
相關次數: | 點閱:591 下載:5 |
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在化學機械平坦化 (Chemical Mechanical Polishing/Planarization, CMP)的製程當中,鑽石修整製通常用來修整拋光墊表面形貌以及維持工作能力,以確保製程中的良率。在鑽石修整時,拋光墊與鑽石修整器皆以行星式的運動方式旋轉。本研究首先利用不同角度的金字塔型的鑽石60°、90°、120°搭配不同下壓力對兩款拋光墊實心拋光墊與具孔洞之複合拋光墊進行壓痕實驗,從壓痕實驗可以得知拋光墊為高彈性之材料,在實心拋光墊之壓縮回彈率達90 %至97 %,而具孔洞之複合墊因孔洞之關係,使得壓縮回彈率在76 %至89 %。利用壓痕實驗之條件來進行面方向與刃方向之單溝槽之修整實驗。藉由3D Plowing Ratio、材料移除率和在鑽石之力量分布來對單顆鑽石修整進行分析。接著進行多角度之交叉修整實驗,探討在經二次修整之影響,不同交叉角度所造成之影響,在綜合結果比較後,在單溝槽之修整實驗鑽石角度為90°時,有較大之PCR以及較小且穩定之三維犁削比 (3D Plowing Ratio)。在多角度交叉修整實心拋光墊時,在交叉角度較大時會有較大之PCR之結果。故鑽石角度為90°時,較適合用來進行鑽石修整器之設計。
In Chemical Mechanical Polishing/Planarization (CMP) process, diamond dressing process of polishing pad with diamond conditioner is critical to condition pad surface topography and maintain pad capability for providing the uniform datum plane for global wafer planarization and local film of devices on chip dies level polishing. This study aims to investigate multi-angle cross-dressing of non-porous pad and composite porous pad by single diamond tool. At first, this study adopts three different pyramid-shaped diamonds of grit angle as 60°, 90° and 120° with different down force to indent both polishing pads in the indentation experiment. The non-porous pad used in this study is an elastomer materials of polyurethane (PU) with recovery rate of compression range as 90% to 97%. The composite porous pad has a compression recovery rate of 76% to 89% due to the porosity and also a softer sub-pad. The single diamond dressing (SDD) experiment with face and edge direction dressing (FDD, EDD) use the same conditions of indentation test. Dressing force has been measured by z-axis dynamometer installed in the tool holder and also the platen motor current reading from the PLC data. The fundamental dressing properties can be analyzed by 3D plowing ratio, pad cutting rate (PCR) and the force distribution on diamond grit. In multi-angle single diamond cross-dressing (SDCD) experiment, influence of different cross-angles after the second dressing has been measured by pad topography and discussed. After comparing experimental results, there is a larger PCR and a small and stable 3D Plowing Ratio on diamond grit angle of 90° in SDD tests. In SDCD experiment, there is a large PCR when the crossing angle is larger. From current set-up and experimental results, the diamond grit angle 90° has obtained higher PCR either in SDD tests and SDCD tests with larger crossing angle. Results of this study can be further applied for optimal design of the diamond dresser for efficient CMP process.
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