研究生: |
蔡昀娜 Yun-Na Tsai |
---|---|
論文名稱: |
具有多行樣板的層狀定向自組裝模板 設計和佈局分解 Template Design and Layout Decomposition for Lamellar DSA with Multi-Row Templates |
指導教授: |
方劭云
Shao-Yun Fang |
口試委員: |
劉一宇
Yi-Yu Liu 陳勇志 Yung-Chih Chen 李毅郎 Yih-Lang Li |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 電機工程系 Department of Electrical Engineering |
論文出版年: | 2023 |
畢業學年度: | 111 |
語文別: | 英文 |
論文頁數: | 41 |
中文關鍵詞: | 定向自組裝 、層狀定向自組裝 、自對準導通孔 、多重提案 化光刻 |
外文關鍵詞: | Directed self-assembly (DSA), lamellar DSA, self-aligned via (SAV) proces, , multiple patterning lithography (MPL) |
相關次數: | 點閱:400 下載:0 |
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