供應商評選的過程中，製造商必須考量各種因素來決定符合自身需求的評選準則來進行供應商評選，以評選出符合公司整體利益之合格供應商。以往對於半導體製造商評選設備廠商時顯少從廠務設備角度著手，本論文期望從既有文獻中所記載之半導體製造商評選廠務設備廠商時可能考量之因素，經由多準則決策分析方法中的層級程序分析法找出關鍵的因子，評估準則間之相對權重，以建立半導體廠廠務設備供應商之評選模式，予以檢視修正，以最經濟之投資、滿足技術發展、取得最適之廠務設備，發展一套完整的廠務設備採購決策模式，將有助於提升半導體廠商之市場競爭力。
本研究擬定半導體廠務設備供應商評選指標系統，包括：「價格」、「品質」、「交期與彈性」、「生產、技術與創新」、「財務與績效」及「商業關係與服務」等六大構面。構面指標部份，依序排列分別是價格構面權重值0.449，排序第一，品質構面權重值0.242排序2，財務與績效構面權重值0.138排序3，交期與彈性構面權重值0,09排序4，生產、技術與創新構面權重值0.058排序5，商業關係與服務構面權重值0.044排序6。

In the supplier selection process, the manufacturer must consider a variety of factors to determine the selection criteria to meet its needs with the company's overall interests. Since the previous experience of the semiconductor manufacturers for selecting suppliers seldom went about the process with the factor of the factory equipment, the thesis expects by studying the described literatures on the semiconductor manufacturer selecting factory equipment factors and using the analytic hierarchy process of the multi-criteria decision analysis method to identify the key factors, assessment criteria between the relative weights to build semiconductor plant's equipment supplier selection model. After revising the model, the thesis develops a complete set of the factory equipment procurement decision-making model, which will help to improve the market competitiveness for the semiconductor manufacturers by considering the factors of the most economic investment, the technological development, and the procurement for the optimum equipment.
This study develops a semiconductor factory equipment supplier evaluation index system, including six dimensions: "price", "quality", "delivery and flexibility", "production, technology and innovation", "finance & performance", and "commercial relationship and service." The indicator portions of the six dimensions are sequentially arranged: the price weights 0.449, ranking first; the quality weights 0.242, ranking 2; the financial and performance perspective weights 0.138, ranking 3; the delivery and flexibility dimension weights 0.09, ranking 4; the production, technology and innovation dimension weights 0.058, ranking 5; the business relationships with service weights 0.044, ranking 6.

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