使用微機電技術製造出微流道系統, 並且由於特徵尺寸的縮小使得 Knudsen
number 增加, 當氣體漸漸由 continuue regime 進入 slip flow regime 時, 傳統的無滑
移條件及理論將不再適用於此, 當氣體進入稀薄情況下, 則必須考慮微觀中氣體分
子與分子之間以及氣體分子與固體邊界所產生的動量交換, 並且將氣體分子與固體
邊界之間的動量交換定義為切線動量修正係數 (TMAC), 此參數為本篇論文中主要
探討影響質量流率的重要參數之一。
在實驗中量測方式為雙槽累積量測系統, 使用此量測方式比起傳統的單槽累積
量測系統最大的差異在於可以將溫度所造成的質量流率變化量降低, 並且準確的量
測出由實驗氣體流入鋼瓶內所造的質量流率得變化量。
在實驗參數設定上主要控制上下游壓力進而改變氣體紐森數, 則在本篇論文中
將使用紐森數將氣體運動行為分為 slip flow 與 transition flow 來進行分析。
本實驗是結果顯示, 氣體在 slip flow 時, 主要影響質量流率得參數為上下游所造
成的壓差變化, 並且得到另一個重要結論為在相同流道中即使實驗氣體不同, 但由
實驗中得到 TAMC 並不會隨著氣體的不同具有太明顯得改變, 因此在這實驗結果
下可將 TMAC 視為定值, 換句話說, 在一種流道中僅具有一種 TMAC 值, 且 TAMC
為常數。
氣體在 transition flow 時, 先前所有推導出的公式將不再適用於此, 故在實驗設
定上將固定上下游的壓差, 主要為觀察氣體密度與質量流率之間的關係, 由實驗結
果顯示, 在此部分主要影響質量流率的參數為單位時間內通過出口截面的分子個
數, 但是當氣體漸漸由 transition flow 進入 free molecular 時, 由於氣體分子在微流道
中流動時與其他氣體分子碰撞的機會極小, 進而使得質量流率漸漸的與紐森數無
關。

The micro-channel system was fabricated using MEMS technology and Knudsen was made due to the reduction in feature size
The number increases, when the gas gradually enters the slip flow regime by the continuue regime, the traditional slipless
The shifting conditions and theory will no longer apply to this. When the gas enters a thin condition, the microscopic gas fraction must be considered.
Exchange of momentum between the sub-molecule and between the gas molecules and the solid boundary, and the gas molecules and solids
The momentum exchange between the boundaries is defined as the tangent momentum correction factor (TMAC), which is the main
Explore one of the important parameters affecting mass flow rate.
In the experiment, the measurement method is a double-slot cumulative measurement system, which is compared with the traditional single-slot accumulation.
The biggest difference in the measurement system is that the amount of mass flow rate change caused by temperature can be reduced, and the exact amount
The amount of change in the mass flow rate created by the flow of the test gas into the cylinder was measured.
In the experimental parameter setting, the main control of upstream and downstream pressure and then change the gas Newson number, in this paper
The gas motion behavior will be divided into slip flow and transition flow using Newson numbers for analysis.
The results of this experiment show that when the gas is in slip flow, the parameters that mainly affect the mass flow rate are made upstream and downstream.
The pressure difference is changed, and another important conclusion is that even if the experimental gas is different in the same flow channel,
The TAMC obtained in the experiment does not change too much with the difference of the gas, so the result of this experiment
TMAC can be considered as a fixed value, in other words, there is only one TMAC value in one flow channel, and TAMC
Is a constant.
When the gas is in transition flow, all the previously derived formulas will no longer apply to this, so in the experimental setup
The pressure difference between the upstream and the downstream will be fixed, mainly to observe the relationship between the gas density and the mass flow rate.
It is shown that the parameters that mainly affect the mass flow rate in this section are the molecules passing through the outlet section per unit time.
Number, but when the gas gradually enters the free molecular by the transition flow, due to the gas molecules in the microchannel
The chance of collision with other gas molecules in the middle flow is extremely small, which leads to the mass flow rate gradually increasing with the Newson number.
turn off.

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