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研究生: 李旻學
Min-Hsueh Lee
論文名稱: 應用漸進式特徵篩選與隨機森林於TFT/LCD陣列段製程產品電性之預測
Applying progressive feature selection and PSO-BPNN approach to predict an electronic property of TFT/LCD array process
指導教授: 歐陽超
Chao Ou-Yang
口試委員: 郭人介
Ren-Jieh Kuo
楊朝龍
Chao-Lung Yang
學位類別: 碩士
Master
系所名稱: 管理學院 - 工業管理系
Department of Industrial Management
論文出版年: 2019
畢業學年度: 107
語文別: 中文
論文頁數: 55
中文關鍵詞: 面板陣列製程面板電性預測漸進式特徵篩選隨機森林演算法向前選擇法特徵工程
外文關鍵詞: TFT/LCD array process, panel electrical properties, progressive feature selection, RandomForest, forward selection, feature engineering
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  • 在面板的陣列( array)製程中,產品的良率與產品電性(Ion及Ioff)有顯著關係。而電性的變異往往相當大,因此面板廠往往需要耗費大量的人力在品質檢驗上,造成原本吃緊的人力在著重於品質的原則下使其產量下降。而面板電性與陣列製程中幾個關鍵機台的控制特徵與環境特徵有相當密切的關係,因此本研究擬提出一適用面板陣列製程之特徵篩選與品質預測模型,協助廠商由目前完成品檢驗模式改為針對在製品檢驗以提升良率並降低生產成本。
    面板陣列製程在製品的電性不只受單一站別影響而是受所有前站影響。亦即若前站在製品電性不良,則會影響到下一站在製品的電性。故本研究提出漸進式特徵預測,即上站最佳解特徵及上站預測結果加入至下一站特徵協助預測,每站擁有所有前站的最佳特徵,目的為保留過往資訊。
    本研究將與國內某主要面板廠合作,藉由其所收集之關鍵機台的特徵資料,先運用權重隨機森林演算法衡量各特徵重要程度,再利用向前選擇法找出影響電性的重要特徵並用以預測電性。希望能藉由所訓練之隨機森林演算法,預測各站製品的電性以提升完成品的良率。
    本研究的成果可替台灣面板廠在陣列段製程建立一新的智慧生產模式。因在製造過程中即可預測產品電性,故工程師可針對預測異常品進行品質控管,利用機台量實際測量該產品,並在數站皆顯示電性異常可立即報廢,此舉不但提高產品良率並可替公司節省相當大生產成本,更可進而提高商譽增加顧客黏著度。


    In the TFT/LCD panel array process, the yield of the product is significantly related to the product's electrical properties (Ion and Ioff). Electricity variation is often quite large in the output of the process, so panel factories often need to spend a lot of manpower in the quality inspection resulting in the decline of output quantity. However, the control and environmental parameters of several key machines in the process have quite close relationship with the panel electrical properties. Therefore, this research intends to propose a feature engineering and quality prediction model. Such that the final output inspection mode applied in the current process can be transferred to WIP inspection mode in order to improve yield and reduce production costs.
    The project will use the infield data collected from a major panel manufacture in Taiwan to identify the main influence parameters by applying weighted RandomForest algorithm to evaluate the importance of each feature, and a novel progressive feature engineering approach. Then, by applying RandomForest algorithm approach to forecast the electricity.
    The research can provide a novel intelligent model for Taiwan panel manufacturers in the array process, which not only improves product yield but also saves considerable costs for the company.

    摘要 I Abstract II 誌謝 III 目錄 IV 圖目錄 VI 表目錄 VII 壹、緒論 1 1.1 研究背景 1 1.2 研究目的 2 1.3 研究議題 5 1.4 重要性 6 貳、文獻探討 8 2.1 TFT-LCD介紹及研究 8 2.2 隨機森林(Random Forest) 9 2.2.1 隨機森林介紹 9 2.2.2 隨機森林(Random Forest)應用探討 10 2.2.3 權重隨機森林(Weighted Random Forest) 10 2.3 特徵工程(Feature engineering) 11 2.4 類神經網路(Neural Network)應用 11 2.5 XGBOOST(Extreme Gradient Boosting) 12 參、研究方法 14 3.1 漸進式站別預測 14 3.2 研究架構與流程 14 3.3 資料前處理 18 3.3.1 資料整理 18 3.3.2 串接資料 19 3.4 隨機森林衡量特徵之重要程度 19 3.5 特徵工程 21 3.5.1 向前選擇法 21 3.5.2 特徵建構 22 肆、實作研究 24 4.1 資料介紹 24 4.1.1 特徵介紹 24 4.1.2 電性分佈 25 4.2 漸進式站別預測 27 4.3 資料前處理 28 4.3.1 資料整理 28 4.3.2 資料串接 29 4.4 隨機森林參數 30 4.4.1 隨機森林之決策樹數量 30 4.4.2 Generation數 31 4.4.3 Iteration數 33 4.5 特徵衡量及篩選結果 34 4.6 分析重要特徵 39 4.7 各方法比較 43 伍、結論與建議 45 5.1 結論 45 5.2 研究限制與未來建議 46 陸、參考文獻 47

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