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| 研究生： |
游少甫 Shao-fu Yu |
|---|---|
| 論文名稱： |
以矽基材製備微型氫氣燃料電池 Fabrication of a silicon-based hydrogen micro-fuel cell |
| 指導教授： |
李嘉平
Chia-Pyng Lee |
| 口試委員: |
林忠永
Chung-Yung Lin 王孟菊 Meng-Jiy Wang 謝明燈 Ming-Deng Hsieh 劉志建 Chih-Chien Liu |
| 學位類別： |
碩士 Master |
| 系所名稱： |
工程學院 - 化學工程系 Department of Chemical Engineering |
| 論文出版年： | 2007 |
| 畢業學年度： | 95 |
| 語文別： | 中文 |
| 論文頁數： | 85 |
| 中文關鍵詞： | 雙極板 、矽基材 |
| 外文關鍵詞： | silicon substrate, bipolar plate |
| 相關次數： | 點閱：141 下載：1 |
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本實驗利用微影製程與薄膜濺鍍製程成功地製作出以矽基材作為雙極板的微型燃料電池，並針對氧氣流量、氫氣流量和操作溫度的改變來探討對電池性能的影響。
在矽基材的蝕刻方面，本實驗成功地以濕式蝕刻法製作出微型的雙極板。雙極板實際尺寸為長3公分、寬2公分，流道線寬為1釐米，而雙極板上流場的有效面積為1.42 cm2。在沉積金屬膜的部分，實驗中以四點探針法量出銅膜的電阻率，並以最低電阻率的實驗參數來沉積銅膜，希望能降低整個電池的總電阻。在電池性能部分，氧氣流量為50 sccm時有較佳的性能；氫氣流量為225 sccm時有較好的性能；在50、65、80 oC三個不同操作溫度下所得到的結果是操作溫度為65 oC時有最好的性能，在此條件下其最大功率密度為55.9 mW/cm2。
Silicon bipolar plates can be successfully fabricated by using lithography process and sputtering technique in this experiment. The cell performance was investigated by varying oxygen flow rate, hydrogen flow rate and cell operation temperature.
Wet-etching was successfully used to fabricate micro-bipolar plates in this experiment. The length of bipolar plates is 3 cm and the width is 2 cm.The flow channel width is 1 mm and the active area is 1.42 cm2.The resistivity of copper film was measured by Four-Point Probe method and deposition parameters which the leaded to the lowest copper film resistivity was chosen to deposit copper film.The 50 sccm oxygen flow rate and the 225 sccm hydrogen flow rate had the best cell performance.By varying operation temperature from 50 to 80 oC, the cell had the best performance at the 65 oC and its maximum power density was 55.9 mW/cm2.
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