本研究探討壓電材料於有限空間的腔體中振動並與液體相互耦合之振動特性的影響，應用於壓電式幫浦同反相與不同模態振形作動進而推動液體產生流量，透過多種實驗量測及數值計算的研究方法得知壓電材料於不同流體時的共振頻率及共振模態。研究主要探討壓電雙層圓盤在與空氣、水和甘油耦合作動下影響的振動特性，並設計兩種不同型式的壓電幫浦進行比較，其一設計是利用串聯型壓電雙層圓盤並結合PDMS高分子薄膜形成類似自由邊界的形式，在共振頻率下驅動而產生位移進而改變腔體體積，使液體因腔體的體積變化而增加流體的流量；另一設計則是利用並聯式壓電雙層圓盤於固定邊界下直接與流體接觸之壓電幫浦。本研究之壓電元件與液體耦合的振動特性使用三種量測設備進行實驗量測，包括垂直式的全域式電子斑點干涉術（Electronic Speckle Pattern Interferometry, ESPI），對壓電材料於流體中的振動狀態進行即時量測，紀錄壓電材料與不同流體時耦合作用下的共振頻率與振動模態，雷射都卜勒振動儀(Laser Doppler Vibrometer, LDV)以單點量測壓電材料與流體耦合的面外振動位移，並可使用穩態掃頻的方式獲得壓電幫浦於固液耦合的面外共振頻率，阻抗分析儀則針對壓電材料的電性進行量測，主要獲得面內耦合面外振動的共振頻率與反共振頻率。另外，本研究再使用聚偏二氟乙烯(PVDF)壓電薄膜感測器實際量測上下結構中的兩壓電圓盤運作時的相位，為了振形可對稱對齊產生推擠效果。本研究可對壓電雙層圓盤耦合不同流體的振動特性進行量測，所有的實驗量測結果皆與固液耦合的有限元素數值計算進行分析比較，無論在共振頻率或振動模態皆可相互對應，對於壓電材料的動態特性於實驗量測與數值分析皆進行比較，成功獲得壓電元件於流體上與流體內的振動特性，準確獲得其共振頻率與振動模態。本研究將得到的振動特性結果應用於兩種不同的壓電幫浦中，分別在不同流體於空氣、水與甘油作用分析共振頻率與探討振動模態對於壓電幫浦流量的影響，並且進行開放式流道系統之流速探討，對於不同的壓電幫浦設計在空氣、水與甘油中的固液耦合共振頻率及振動模態提供完整且豐富的資訊。

This study investigated the vibration characteristics of two-layered piezoelectric disks with regard to the solid-liquid coupling effect in pump devices. Experimental measurements and finite element numerical calculations were used to determine the resonant frequencies and mode shapes of two piezoelectric disks, which could be used to promote the flow of air, water, and glycerin in in-phase and anti-phase motions. Two piezoelectric pumps were designed to verify the solid-liquid coupled vibrations of the two-layered piezoelectric disks using on pumps with piezoelectric disks located above the surface of the fluid 1) under quasi-free boundary condition and 2) under rim-clamped boundary condition. The first pump has a piezoelectric bimorph bonded to PDMS polymer, such that resonant vibrations produce changes in the volume of the chamber, which increases the flow of fluid. Another is a piezoelectric disk embedded on the rim of pump chamber to promote the flow of liquid by peristaltic motion. Three experimental techniques were used to determine the solid-liquid coupled vibration characteristics. Electric speckle pattern interferometry (ESPI) was used to measure the resonant frequencies and mode shapes associated with the vibration of two-layered piezoelectric disks interacting with fluids. Second, a laser Doppler vibrometer (LDV) was used to obtain the frequency spectrum of vibrating displacement using dynamic signal swept-sine analysis. The third experiment involved analyzing impedance in the piezoelectric bimorphs in order to identify the resonant frequencies and anti-resonant frequencies of the piezoelectric material under the influence of a fluid. Finite element method (FEM) was used for the analysis of vibration characteristics associated with the interaction between the fluids and piezoelectric-solid elements with acoustic elements. All experimental results are compared with the solid-liquid coupled vibration characteristics calculated using FEM. Finally, the two types of piezoelectric pumps were operated at resonant frequencies in order to measure the flow rate from input water. Finite element numerical calculations of resonant frequencies and mode shapes presented good agreement with experimental measurements.

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