本研究利用改良式溶膠-凝膠法製備鋯鈦酸鉛(PZT)鐵電厚膜，使用二氧化碳雷射退火製程將厚膜非晶相結構轉換成具鐵電特性之鈣鈦礦結構，並與爐管退火作為比較。實驗中利用溶膠-凝膠法製備出500℃ ~ 750℃六種不同成相溫度粉末，粉末顆粒尺寸平均約100 nm ~ 300 nm左右，藉由細緻的粉末製備出較細緻的鐵電厚膜結構層。本文分析厚膜試片使用儀器有X-ray繞射分析儀(XRD)、場發式掃描電子顯微鏡(FESEM)、鐵電特性量測系統、漏電流等量測方法，進行鋯鈦酸鉛鐵電厚膜微觀結構與特性分析。
使用較低退火溫度製備鋯鈦酸鉛粉末具有較小的顆粒尺寸，本實驗中製備三種不同成相溫度粉末之厚膜試片，經雷射退火與爐管退火厚膜試片相互比較特性。實驗結果顯示，550℃粉末具些許焦綠石相，由於爐管退火的溫度與時間不足，無法使550℃厚膜中具有焦綠石相之粉末轉換成鈣鈦礦相，而雷射退火可瞬間產生高能量使焦綠石相粉末轉為鈣鈦礦結構，故經雷射退火之厚膜試片殘留極化值可高達24.29 μC/cm2比爐管退火之殘留極化值2.78 μC/cm2具有更優異的表現。
使用氧化物法製備之鋯鈦酸鉛粉末顆粒尺寸平均約626 nm，與溶膠-凝膠法之細緻鋯鈦酸鉛粉末製備厚膜試片比較，顆粒粗大之厚膜結構會具有較多的表面裂紋與厚膜層孔洞產生，其厚膜具有較多的空洞與較不平整的厚膜表面，會影響厚膜試片之鐵電特性與漏電流值，其氧化物法厚膜試片漏電流變化呈現相當大的變動，氧化物法粉末製備五層厚膜試片經雷射退火功率120 W/cm2持溫5秒之殘留極化值最高只到達4.21 μC/cm2與漏電流密度高達4.89e-10 A/cm2。故粉末顆粒大小將影響厚膜結構緻密度，其鐵電特性與漏電流將有所影響。
雷射退火鋯鈦酸鉛厚膜試片與爐管退火比較具有相當多的優勢，雷射退火影響參數有雷射功率密度大小、退火處理時間控制以及最佳處理厚膜試片厚度，厚膜試片才會有優異的特性呈現，均是實驗中必須考慮的因素。根據前人研究中提到雷射退火厚膜試片最佳穿透深度為鋯鈦酸鉛五層厚膜，厚度約5 μm厚。本研究中將五層厚膜經雷射退火處理過後，接著於處理過後之五層厚膜試片上，再旋鍍上鋯鈦酸鉛五層厚膜層，再經雷射退火處理，依每五層厚膜經雷射功率100 W/cm2退火15秒處理之步驟，當循環四次可成功製備出20 μm具有相當厚度之鋯鈦酸鉛厚膜結構，且厚膜層均經雷射退火處理轉換成鈣鈦礦結構，於鐵電特性量測中，二十層厚膜試片其殘留極化值可高達Pr=27.74 μC/cm2與矯頑電場值Ec=0.71 kV/cm，具有相當優異的鐵電特性。本研究中可利用二氧化碳雷射退火製備出達20 μm厚度之鋯鈦酸鉛厚膜結構，並得到優異的鐵電特性。

In this study, lead zirconate titanate (PZT) ferroelectric thick films are prepared by a modified Sol-Gel method. The microstructure of the thick film is transformed from the amorphous phase to the perovskite structure by carbon dioxide laser annealing. A comparison with furnace annealing is also provided.
Six kinds of powders with an average size among 100 nm ~ 300 nm, temperature ranging from 500℃ ~ 750℃, are prepared by a Sol-Gel method. The nano-powders lead to finer PZT thick films. In this paper, microstructure and properties of PZT thick films are analyzed by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and ferroelectric propert testing system.
In the experiment, the thick films of three different temperatures are prepared by PZT powders with smaller grain sizes under lower annealing temperature. The products are compared with those of laser annealing and furnace annealing. On the basis of our examination, the transformation of 550℃ thick films with pyrochlore powders to perovskite structure is failed due to insufficient time and temperature in furnace annealing. On the other hand, a sudden increase in laser energy successfully transforms the pyrochlore powders into the perovskite structure. It follows that laser annealing is more powerful than furnace annealing in terms of the remnant polarization (Pr) of the thick films prepared (24.29 μC/cm2 > 2.78 μC/cm2 ).
The average size of lead zirconate titanate powders prepared by oxidization is 626 nm, larger than that by Sol-Gel method. It is also observed that there are more holes and cracks on the surface of the thick films as a result of larger grain sizes. In addition to that, the roughness also results in variability of leakage current density. The remnant polarization (Pr) of 5-layer thick films can only reach 4.21 μC/cm2 , with leakage current density to 4.89e-10 A/cm2, under laser annealing power 120 W/cm2, 5-second constant temperature. The grain sizes have effects on the fineness of thick films, ferroelectric properties, and leakage current density.
In comparison with furnace annealing, laser annealing is superior in a number of ways. There are several variables that should be considered, including laser power density, annealing time control, and best thickness of films, which all contribute to successful thick films. In the previous research, the ultimate penetration depth should be 5 μm, about 5 layers of perovskite lead titanate. In the present study, 5 layers of thick films annealed by laser are spin coated with perovskite lead titanate, followed by another laser annealing. The process is repeated four times under laser power 100 W/cm2 for 15 seconds in each set of five layers, resulting in a 20 μm thick film. In testing the ferroelectric properties, the remnant polarization reaches as high as 27.74 μC/cm2 in the perovskite structure transformed, with the value of coercive electric field Ec=0.71 kV/cm. The properties are quite impressive.
In short, lead zirconate titanate (PZT) thick films, with thickness 20 μm, are prepared by carbon dioxide laser annealing, resulting in great ferroelectric properties.

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