研究生: |
高薇湄 Wei-mei Kao |
---|---|
論文名稱: |
波導間距與寬度對高分子非對稱布拉格耦合濾波器之影響 The effect of the waveguide gap and asymmetric on the coupling efficiency of polymer asymmetric Bragg couplers |
指導教授: |
趙振綱
Ching-kong Chao 何智廷 Chi-ting HO |
口試委員: |
李維楨
Wei-chen Lee |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2010 |
畢業學年度: | 98 |
語文別: | 中文 |
論文頁數: | 104 |
中文關鍵詞: | 微模轉印技術 、軟式微影技術 、全像術干涉微影技術 、非對稱布拉格耦合濾波器元件 |
外文關鍵詞: | soft lithography, micro molding, asymmetric Bragg coupler, holographic interference techniques |
相關次數: | 點閱:183 下載:5 |
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本論文將利用全像術干涉微影技術、軟式微影技術以及微模轉印技術在雙通道高分子波導濾波器上製作非對稱布拉格耦合元件(asymmetric Bragg coupler based filters, ABC),並得到兩平行波導間寬度,及其非對稱性對耦合效率之影響。
實驗中使用全像術干涉微影技術與軟式微影技術製作高分子光柵元件;接著利用高分子光柵元件配合黃光微影之厚膜光阻製程與軟式微影技術,製作高分子布拉格光柵波導元件。
最後以原子力顯微鏡(AFM)、掃描式電子顯微鏡(SEM)與光學量測方法觀察及紀錄實驗之結果,而光學傳輸特性可由Tunable Laser光頻譜分析儀所量測得知。
本研究成功製作非對稱布拉格耦合濾波器元件,在穿透及自我反射的布拉格波長中,以-3dB介質損耗為準,其傳輸垂度大約在-16.4和-11.5dB處,而且在3dB的傳輸頻寬大約是0.6和0.5nm;當傳輸光頻譜重疊時,表示兩個單一的波導其等效折射率的差小於0.002。
In this work, we successfully developed a process to fabricate dual-channel polymeric waveguide filters based on an asymmetric Bragg coupler (ABC) using holographic interference techniques, soft lithography and micro molding. We also obtain the influence of the waveguide gap and asymmetric on the coupling efficiency of polymer asymmetric Bragg coupler.
In this experiment, the grating structure on a polymer is fabricated first using holographic interference techniques and micro molding processes. Next, we will fabricate an asymmetric Bragg coupler device through photolithography process and soft lithography on a thick film photoresister.
Finally, the grating profiles of the devices were observed using SEM and AFM system. The optical transmission characteristics were measured in terms of Tunable Laser spectrum analyzer.
At the cross- and self-reflection Bragg wavelengths, the transmission dips of approximately –16.4 and –11.5dB relative to the -3dB background insertion loss and the 3dB transmission bandwidths of approximately 0.6 and 0.5nm were obtained from an ABC-based filter. The transmission spectrum overlaps when the effective index difference between two single waveguides is less than 0.002.
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