在矽線波導的元件中，光的相位變化會影響元件的波長響應，而相位改變的原因主要來自波導間有效折射率的變化。微環型諧振器 (Mircroring Resonator, MRR)與陣列波導光柵(Arrayed Waveguide Grating, AWG)作為矽線波導元件，不只要求濾波波段的精確，也需要將串擾(Crosstalk)降低，而影響這些的原因就是相位，這使得監測相位成為最重要的議題，因此本論文將會深入的討論矽線波導的相位及其改善的方法。
本論文設計並量測MRR與AWG等矽線波導元件的波長頻譜，運用低同調光源以及Mach-Zehnder干涉儀作為實驗架構主體，分析元件干涉波包，得知波包之間的同調長度，藉由將結果帶入模擬軟體，以此反推相位的變化，並且探討如何從設計端與製程配合改善，避免因相位導致濾波波段與串擾的異常。
而低同調光干涉技術也可以延伸應用在模態分割多路複用(MDM)的元件中，藉由TE0與TE1在波導中的有效折射率變化，以監測相位的方式，瞭解模態在波導之間的變化。

In the component of the Silicon waveguide, the phase change of the light affects the wavelength response of the component, and the cause of the phase change mainly comes from the change in the effective refractive index between the waveguides. Microring Resonator (MRR) and Arrayed Waveguide Grating (AWG) are main components that require not only the accuracy of the filter band but also reduce the crosstalk. The reason is Phase, which makes the monitoring phase the most important issue, so this thesis will discuss the various phases of the Silicon waveguide and how to improve it.
In this thesis, the wavelength spectra of filter elements such as MRR and AWG are designed and measured, and the Low-Coherent light source and Mach-Zehnder interferometer are used as the main body of the experimental framework. Analyze component interference wave packets to know the coherence length between wave packets. By pushing the results into the simulation software, the phase change is reversed and how it can be improved from design to process. Avoid abnormalities in filtering bands and crosstalk due to phase.
The Low-Coherence Optical Interference technique can also be extended to the components of Modal Division Multiplexing (MDM). The phase is monitored by the effective refractive index change of TE0 and TE1 in the waveguide. Learn about the modal changes between the waveguides.

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