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研究生: 戴智為
Jhih-Wei Dai
論文名稱: 天然橡膠與丁腈橡膠對於氫氧化四甲基銨抗滲透性的研究
The Permeation of Tetramethyl Ammonium Hydroxide Through Natural Rubber and Nitrile Glove Materials
指導教授: 蘇清淵
Ching-Iuan Su
口試委員: 張振平
Jhen-Ping Jhang
楊銘乾
Ming-Chien Yang
王英靖
Ying-Jing Wang
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2009
畢業學年度: 97
語文別: 中文
論文頁數: 81
中文關鍵詞: 抗滲透性防護材料氫氧化四甲基銨
外文關鍵詞: Protective materials, Permeability resistance, TMAH
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  • 氫氧化四甲基銨 (Tetramethyl Ammonium Hydroxide, TMAH)目前大量使用在半導體與光電等高科技產業中。本研究主要目的為,探討橡膠防護材料對TMAH的抗滲透防護性能的影響。
    研究結果發現,NR防護手套與Nitrile防護手套對低濃度2.38%TMAH防護性能明顯優於高濃度25%TMAH;環境溫度23℃下,NR防護手套和Nitrile防護手套對濃度25%TMAH平均破出時間分別為90.93分鐘及801.67分鐘,而在環境溫度達35℃下,NR防護手套與Nitrile防護手套破出時間平均下降24%和43%,溫度升高顯然使橡膠防護手套之防護效能有相當程度下降的情形;採用雙層橡膠防護手套情況下,在環境溫度23℃時,雙層NR防護手套對濃度25%TMAH平均破出時間長達1592.8分鐘;橡膠材料浸水後則會影響橡膠材料抗滲透性質,使破出時間減少,特別值得注意的是, Nitrile防護手套材料放置於外層搭配NR防護手套材料放置於內層(Nitrile / NR)之平均破出時間長達2033.2分鐘,兩種橡膠防護手套穿戴順序正確則能有效阻隔TMAH滲透性,此為本研究最佳結果。


    At present, Tetramethyl Ammonium Hydroxide (TMAH) has been used in large amounts in high-tech industries, such as semiconductor industry and optoelectronics industry. This study aimed to discuss the permeation prevention performance of rubber protective materials against TMAH.
    The results indicated that, the protective performances of NR protective glove and Nitrile protective glove are better against low-concentration 2.38% TMAH than against high-concentration 25% TMAH. When the ambient temperature is 23℃, the average breakthrough times of NR protective glove and Nitrile protective glove against 25% TMAH are 90.93 minutes and 801.67 minutes respectively; when the ambient temperature reaches 35℃, the average breakthrough times fall by 24% and 43% respectively; therefore, the temperature rise degenerates the protective effect to a considerable extent. If double-layer gloves are used, when the ambient temperature is 23℃, the average breakthrough time against 25% TMAH is as long as 1,592.8 minutes. After being dipped in water, the permeation prevention performance of rubber materials may be affected so that the breakthrough time becomes less. It is important to note that the average breakthrough time reaches 2,033.2 minutes for the combination with Nitrile protective gloves outside and NR gloves inside. The correct arrangement of the two kinds of protective gloves can effectively prevent the permeation of TMAH. This is the best result achieved in this study.

    摘要 I Abstract II 致謝 III 目錄 IV 圖目錄 VI 表目錄 VIII 第一章 前言 1 1.1 研究背景 1 1.2 研究目的 4 第二章 文獻探討 5 2.1 個人防護裝備(PPE) 5 2.2 高分子材料 10 2.3 理論 14 2.3.1 滲透機制 14 2.3.2 化學物質滲透模式 18 2.3.3 文獻回顧 20 2.4 氫氧化四甲基銨Tetramethyl Ammonium Hydroxide, TMAH 25 2.5 國際主要抗滲透性測試方法 29 第三章 實驗材料方法 30 3.1 滲透測試方法 32 3.1.1 實驗儀器 37 3.1.2 分析儀器之定量 39 3.1.3 離子層析儀/電化學偵測器之實際值與理論值相關係數 42 3.2 實驗材料 45 3.3 實驗步驟 46 第四章 結果與討論 49 4.1橡膠防護手套對於不同濃度TMAH抗滲透性 49 4.2 不同環境溫度下橡膠防護手套對25%TMAH抗滲透性 55 4.3 雙層橡膠防護手套對25% TMAH抗滲透性 59 4.4 水分子對NR防護手套TMAH抗滲透性的影響 64 第五章 結論 72 參考文獻 74 附錄一 80

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