目前國內外微幫浦相關研究，大多數以微機電的製程技術來製作無閥式微幫浦的微流道，幾何形狀只能達到2.5D的特徵，進出口流道的位置與方向，亦受到限制。本研究以推動微小水下載具之需求，開發進出口流道相互垂直之無閥式微幫浦，設計與製作3D角錐式微流道。同時為了流體能較順暢進出流道，入口流道將加入一傾斜角度，以提升微幫浦之效能。
本研究3D角錐式微流道的設計，探討不同擴散角(10°、20°、30°、40°、50°)及不同入口傾斜角度(5°、10°、15°、20°、25°)之影響。以層加工法中SDM(Shape Deposition Manufacturing)製程，將3D模型透過CAD/CAM軟體，進行最佳切層與加工規畫，並以高分子聚合物為主要材料，蠟材為支撐材料，使用高速數控工具機，切削出各層之幾何特徵。微幫浦得設計採四進一出，最小尺寸在入口流道入口端為160μm×160μm，微幫浦的外型尺寸為直徑13.62mm，腔室直徑為8.5mm，厚度為3mm，並採用成本低廉的壓電蜂鳴片為驅動元件。為有效固定壓電鳴蜂片及配合量測需求，本研究亦設計並製作出封裝元件及量測平台，搭配量測儀器進行微幫浦的效能測試，輸入方波電壓為50 V。測試後的結果顯示，在固定擴散角為10°時，入口傾斜角度以20°較佳，最大流量為1100Hz下的1207.44μl/min；無入口傾斜角度時，擴散角則以20°時為最佳，驅動頻率為1100 Hz時，可達最大流量1599.91μl/min。

Most researches in valveless micropump utilized MEMS processes to fabricate channels. Due to the process limitation, the geometry features can only be 2.5D. Also, the location and the direction of inlets and outlets are restricted. In this research, based on the need for propelling a micro-scale underwater vehicle, micropumps with inlets perpendicular to outlet were developed. A 3D pyramidal channel design was adopted. Moreover, in order to smooth the flow from inlet to outlet, a slant angle was added at inlets.
In the 3D pyramidal channel design, different diffuser angles (10, 20, 30, 40, and 50 degrees) and slang angles at inlets (5, 10, 15, 20, and 25 degrees) were investigated. SDM (Shape Deposition Manufacturing) process, a layered manufacturing technique, was used to fabricate micropumps. The 3D CAD models were sliced and process-planned in CAD/CAM software. In each layer, with polymer as part material and wax as support material, the features were defined by a CNC machine after material deposition. The micropump had 4 inlets and 1 outlet with minimal dimension of 160 × 160μm at inlet entrance. The outer diameter of the micropump was 13.62mm, and the chamber was 8.5mm in diameter and 3mm thick. A low-cost piezoelectric buzzer was used to trigger the micropump. Besides, in order to fix the buzzer and to satisfy the measurement need, the packaging/assembly component and measurement platform were developed. The tests were conducted at input voltage of 50V. As a result, when the diffuser angle was 10 degrees, slant angle of 20 degrees is preferred with the flow rate of 1207.44μl/min at 1100 Hz. Without slant angle, the diffuser angle of 20 degrees was the best. The maximal flow rate was 1599.91 μl/min at 1100 Hz.

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