本研究將探討透輝石相玻璃陶瓷(CaMgSi2O6) 材料系統，以開發出具低介電常數 (low dielectric constant, k)、高品質因子值(high quality factor, Qxf) 和具低共振溫度頻率係數(Temperature coefficient of the resonance frequency, τf) 之微波介電陶瓷材料，且期望此材料系統可於氮氣下之較低工作溫度(≦1000oC) 和銅電極進行共燒。
首先為了提升CaMgSi2O6玻璃陶瓷之品質因子，配置不同莫耳比例之 (ZnxMg1-x)2SiO4(x=0~1) 陶瓷粉體，並且探討其基本特性，根據Mg2SiO4- Zn2SiO4二元相圖可得知共晶點大約在x=0.7附近，因此由實驗結果可得知 (Zn0.6Mg0.4)2SiO4、(Zn0.7Mg0.3)2SiO4、(Zn0.8Mg0.2)2SiO4於大氣下1250 oC/2hr 之燒結熱處理即可燒結緻密， 其中(Zn0.6Mg0.4)2SiO4於大氣下1250 oC、1300oC/2hr燒結時可得到品質因子(Qxf)將近45,000 GHz。
另外本實驗也將不同莫耳比之10wt% (ZnxMg1-x)2SiO4(x=0~1) 陶瓷粉體添加至CaMgSi2O6玻璃陶瓷中，以期望能提升品質因子，並且於960 oC可燒結緻密，由實驗結果可得知當添加(Zn0.6Mg0.4)2SiO4陶瓷於大氣下960oC/2hr燒結時，品質因子可由11,233GHz提升至13,845 GHz，但 f值則是偏高的 -72 ppm/oC。
然而f 值偏高會影響到在不同溫度下，元件之訊號發射與接受之品質，因此將在CaMgSi2O6玻璃陶瓷中添加CaTiO3 陶瓷以改善f值，並同時添加(ZnxMg1-x)2SiO4陶瓷以提升品質因子(Qxf)，而由本實驗或先前研究發現，CaTiO3 陶瓷會溶於CaMgSi2O6玻璃陶瓷之中而無法完全成相的問題，但若再添加(ZnxMg1-x)2SiO4(x=0、6、7、8)時，能誘發結晶度提升，不但能提升其品質因子，且還能穩定CaTiO3陶瓷存在於CaMgSi2O6玻璃陶瓷中，進而能改善其f 值，而由XRD分析及unit cell軟體之晶格常數計算也可證明於CaMgSi2O6玻璃陶瓷中同時添加CaTiO3 陶瓷以及(ZnxMg1-x)2SiO4(x=0、6、7、8)陶瓷時，CaTiO3 陶瓷可明顯成相且晶胞體積膨脹較小，也推測較少的CaTiO3 陶瓷溶於其中，而當CaMgSi2O6玻璃陶瓷中同時添加8wt% CaTiO3 及8wt%(Zn0.6Mg0.4)2SiO4於氮氣下960oC/2hr熱處理時，可達到一組最佳之微波介電特性為k=8.62，Qxf =11,650GHz，f = -1.2ppm/oC。
最後將CaMgSi2O6透輝石相玻璃陶瓷於氮氣下960oC/2hr與銅膠進行共燒，經由XRD分析銅並無氧化之情形，但銅電極與CaMgSi2O6玻璃陶瓷之交界面將會有銅化合物如Cu4MgO5、Ca2CuO3及Ca2MgSi2O7、Mg2SiO4、SiO2二次相產生，而由於Ca2MgSi2O7、Mg2SiO4都具有不錯的品質因子特性，能夠穩定住CaMgSi2O6玻璃陶瓷之品質因子特性不隨著其他二次相之產生而下降，因此與銅共燒後微波介電特性並無明顯變化，而後再於CaMgSi2O6透輝石相玻璃陶瓷中同時添加10 wt% (Zn0.6Mg0.4)2SiO4及8 wt% CaTiO3陶瓷於氮氣下960oC/2hr與銅膠進行共燒後可得到具低介電常數k=8.36及高品質因子Qxf = 9061GHz，且微波介電特性也不會因與銅膠共燒後而有明顯差異。

In this study, diopside glass-ceramics (CaMgSi2O6) materials sintered at temperature below 1000 oC and co-fired with copper electrodes in a reducing atmosphere, which required a low dielectric constant (k), high quality factor (Q×f) and a near zero temperature coefficient of the resonance frequency (τf) as a microwave dielectric ceramic materials, were studied.
First, in order to improve the quality factor of CaMgSi2O6 glass ceramics, configured with different molar proportions of (ZnxMg1-x)2SiO4 (x=0~1) ceramic powders, and explore its basic characteristics. According to the Mg2SiO4-Zn2SiO4 binary phase diagram the eutectic point about near x = 0.7, therefore the experimental results revealed that the densification temperature of (ZnxMg1-x)2SiO4 (x=0.6、0.7、0.8) ceramics can decrease to 1250oC. The quality factor values of (Zn0.6Mg0.4)2SiO4 can achieve nearly 45,000 GHz by sintering in air at temperature 1250 oC and 1300 oC for 2hr.
Furthermore, adding different molar ratio of 10 wt% (ZnxMg1-x)2SiO4 (x=0~1) ceramic powders into CaMgSi2O6 glass ceramics to enhance the quality factor. From the experiment results, the quality factor values increased from 11,233 GHz to 13,845 GHz due to the addition of (Zn0.6Mg0.4)2SiO4 ceramics powders sintered in air at temperature 960 oC for 2hr.
In order to improve the τf values to near 0ppm/oC and enhance quality factor values , CaTiO3 and (ZnxMg1-x)2SiO4 (x=0、0.6、0.7、0.8) was added to CaMgSi2O6 glass ceramics. Based on the previous studies, CaTiO3 soluted into the CaMgSi2O6 glass ceramics, so can’t improve the τf values. Experimental results showed that doped (ZnxMg1-x)2SiO4 ceramics can induce the crystallization of diopside glass-ceramics and caused CaTiO3 stability in the material system. Therefore, CaMgSi2O6 glass-ceramics added with 8wt% (Zn0.6Mg0.4)2SiO4 and 8wt% CaTiO3 ceramics sintered in reducing atmosphere at 960oC for 2hr shows excellent microwave dielectric properties : k=8.62，Qxf=11,650 GHz and f=-1.2 ppm/oC .
At last , CaMgSi2O6 glass-ceramics with copper electrodes were co-fired in reducing atmosphere at 960oC for 2hr and analyzed to detect interactions between the glass-ceramics and electrodes. XRD analysis revealed Cu4MgO5, Ca2CuO3, Ca2MgSi2O7, Mg2SiO4 and SiO2 secondary phases, which appears in the interface after co-firing. Due to high quality factor of Ca2MgSi2O7 and Mg2SiO4 secondary phases, it does not induce degradation in quality factor values. CaMgSi2O6 glass-ceramics doped 10wt% (Zn0.6Mg0.4)2SiO4 and 8wt% CaTiO3 ceramics with copper electrodes were co-fired in reducing atmosphere at 960oC for 2hr shows microwave dielectric properties : k=8.36，Qxf=9,061 GHz.

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