研究生: |
徐偉程 Wei-Cheng Hsu |
---|---|
論文名稱: |
7056玻璃與Kovar合金密封接合技術研究-界面粗糙度對界面結構和機械性質的影響 7056 Glass-to-Kovar sealing-effect of interfacial roughness on the interfacial structures and mechanical property |
指導教授: |
蔡顯榮
Hsien-Lung Tsai |
口試委員: |
顏怡文
Yee-WenYen 黃聖芳 Sheng-Fang Huang |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2006 |
畢業學年度: | 94 |
語文別: | 英文 |
論文頁數: | 76 |
中文關鍵詞: | 密封接合 、粗糙度 、鍵結強度 |
外文關鍵詞: | Sealing, Roughness, Bonding strength |
相關次數: | 點閱:381 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本研究針對7056玻璃與Kovar合金密封接合的界面和玻璃對Kovar合金潤濕性作探討。在密封接合前,會在Kovar合金上預先氧化一層氧化鐵。對於合金在不同的氧化處理下,如二次氧化,玻璃和Kovar的界面結構將會改變。在分別利用剪力實驗、光學顯微鏡(OM)、掃描式電子顯微鏡(SEM)對接合界面之成分分佈及性能加以分析。實驗結果顯示,於二次氧化處理下,用#600砂紙研磨Kovar所得到粗糙的界面與玻璃進行接合後,界面呈現緊密但範圍較窄的針狀結構。然而使用#1500砂紙研磨得到平坦的界面再進行接合,界面卻得到鬆散但範圍較廣的針狀結構。比較其剪力強度,Kovar合金預氧化後再與玻璃接合的強度為最佳,其次為無預氧化Kovar合金與玻璃接合強度與二次氧化下粗操界面接合(#600),最差的為二次氧化下平坦界面接合(#1500)。證明針狀組織的出現對於玻璃和金屬密封接合產生差的鍵結強度。
The interfacial characteristic of the 7056 glass-to-Kovar sealing and wetting behavior of glass to Kovar were studied. The effect of oxide layer of Kovar on the glass-to-Kovar sealing was also investigated. With another treatment of oxidization as reoxidization, the interfacial structures between glass and Kovar are changed. The shear stress test was carried out to evaluate the influence of sealing experimental parameters on the shear stress strength of glass-to-Kovar sealing. The optical microscope (OM) was used for observation of interfacial characteristic. The scanning electronic microscope (SEM) was employed for investigating the composition distribution across the interface. Experimental results showed that the rough interface with by #600 abrasive paper had the fine and narrow dendritic structures, but the fine interface with reoxidization by #1500 had the loose and wide ones. Comparing the shear stress strength, the preoxidized Kovar-to-glass had better strength than the non-preoxidized sample such as the rough interface (#600) with the fine and narrow dendrtic structures, and the worse sealing strength was the fine interface (#1500) with loose and wide dendrtic structures. It proved the dendrtic structures were bad factors in the glass-to-metal sealing.
1.Annual book of ASTM standards, vol.10.04 ,pp.11-15 (1996).
2.Arun K. Varshneya “Stresses in Glass-to-Metal Seals”; in Treatise on
Materials Science and Technology, Vol.22 Academic Press, New York. pp.241-
306 (1982)
3.L.L. Harner “The Use of Fe-29Ni-17Co In The Electronics Industry”
Carpanter Technology Corporation P.O. box 14662 reading, PA 19612-4662,
pp1-14.
4.黃和悅、陳輝達、蕭永湶、周長彬、曾光宏,”Metal-Can 雷射二極體組件之玻璃與金
屬密封接合技術”,焊接與切割,15卷1期,94年3月。
5.M.G.Nicholas, BSc, PhD, FIM, C Eng, “Joining of Ceramics”, Surface Science
and Technology Department Harwell Laboratory, UK, pp7-30 (1990).
6.Joseph. A. Pask, “From Technology to the Science of Glass/ Metaland
Ceramic/Metal Sealing,” Ceramic Bulletin, Vol.66 No.11, pp.1587-1592 (1987).
7.I. A. Aksay, C. E. Hoge, and J. A. Pask, “Wetting Under Chemical
Equilibrium Condition,” J. Phys. Chem., 12[78] pp.1178-1183(1974).
8.B. W. King, H. P. Tripp, W. H. Duckworth, “Nature of Adherence of Porcelain
Enamels to Metals,” J. Am. Ceram. Soc., 42(11) pp.504-525(1959).
9.MIL-STD-883, “Test Methods and Procedures for Microelectronics ”,
Department of Defense, Washington, D.C., (1984).
10.R. B. Adams, J. A. Pask, “Fundamentals of Glass-to-Metal Bonding: VII,
Wettability of Iron by Molten Sodium Silicate Containing Iron Oxide.” J.
Am. Ceram. Soc. 44[9] pp. 430-433 (1961).
11.J. A. Pask, R. M. Fulrath, “Fundamentals of Glass-to-Metal Bonding:VIII,
Nature of Wetting and Adherence.” J. Am. Ceram. Soc.45[12] pp.592-549
(1962).
12.M. P. Borom, J. A. Pask, “Role of “Adherence Oxides “In the Development
of Chemical Bonding at Glass-Metal Interfaces.” J. Am. Ceram. Soc. 49[1]
pp.1-6 (1966).
13.A. Zanchetta, P. Lefort, “Thermal Expansion and Adhesion of Ceramic to
metal Sealings:Case of Porcelain—Kovar Junctions,” Journal of the
European Ceramic Society 15 pp.233-238 (1995).
14.A. Zanchetta, P. Lortholary, P. Lefort, “Ceramic to metal sealings:
interfacial reactions mechanism in a porcelain—kovar junction,” Journal of
Alloys and Compounds 228 pp.86—95 (1995).
15.J. A. Pask, “New Techniques in Glass-to-Metal Sealing.” Proc. of IRE,
vol.36[2], pp.286-289 (1948).
16.Walter F. Yext, Bruce J. Shook, Wayne S. Katzenberger, Robert C.Michalek,
“Improved Glass-to-Metal Sealing Through Furnace Atmosphere Composition
Control,” IEEE Transactions on Components , Hybrids, and Manufacturing
Technology, Vol.CHMT-6, No.4,pp.455-459 (1983).
17.W. B. Thomas, “Matched Glass-to-Metal Seal improvements By
Controlled Atmosphere Metal Oxidation,” Solid State Technology. , pp.73-75
September (1986).
18.A. W. Hull and E. E. Burger, “Glass-to-metal Seals”, Physics, 5[12] 384-
405(1934).
19.J. A. Pask, “Chemical Reactions and Adherence at Glass—Metal
Interfaces,” Proc. Porcelain Enamel Inst. Tech. Forum, 33, pp.1-15 (1971).
20.A. Dietzel, “Explanation of Adhering Problem in Sheet Iron Enamels, ”
Emailwaren-Ind., 11(19), pp.161-166 (1934);Ceram.Abstr., 13(10), pp.250
(1934).
21.J. C. Richmond, D. G. Moore, H. B. Kirkpatrick, W. N. Harrison,“Relation
Between Roughness of Interface and Adherence ofPorcelain Enamel to Steel,”
J. Am. Ceram. Soc.,36(12), pp.410-416(1953).
22.B. Dunn, “Field-Assisted Bonding of Beta-Alumina to Metals,” J. Am.
Ceram. Soc., 62, pp.545-547 (1979).
23.G. Wallis, D. I. Pomerantz, “Field Assisted Glass-Metal Sealing,”J.
Appl.Phys., 40 pp.3946-3949 (1969).
24.G.Wallis, “Direct-Current Polarization During Field-Assisted Glass -
Metal Sealing,” J. Am. Ceram. Soc.,53, pp.563-567 (1970).
25.M. P. Borom, “Electron-Microprobe Study of Field-Assisted Bonding of
Glasses to Metals,” J. Am. Ceram. Soc.,56, pp.254-257 (1973).
26.M. A. Morsy, K. Ikeuchi, M. Ushio, H. Abe, “Mechanism of Enlargement of
Intimately Contacted Area in Anodic Bonding of Kovar Alloy to Borosilicate
Glass,” Materials Transactions, JIM,37, pp. 1511- 1517 (1996).
27.Danick Briand, Patrick Weber, Nicolaas F. de Rooij,” Bonding properties of
metals anodically bonded to glass”, Sensors and Actuators A114 543–549
(2004).
28.T. R. Anthony,” Anodic bonding of imperfect surfaces,” J. Appl. Phys., 54
[5], pp.419-2428(1983).
29.洪國欣,”7056玻璃與Kovar合金密封接合技術研究” ,台灣科技大學,民國91年6
月。
30.H. P. Tripp, B. W. King, “Thermodynamic Data on Oxides at Elevated
Tempratures,” J. Am. Ceram. Soc., 38[12]pp.432-437(1955).
31.E. Paparazzo, G. Fiero, G. Ingo, and S. Sturlese, “Microchemistry and
Mechanisms of Adherence in Steel/Enamel Interfaces,” J. Am. Ceram. Soc., 71
[12] pp.C-494~ C-497 (1988).