本研究旨在開發一組可攜式表面量測系統，能同時對表面輪廓及粗糙度作評估。完成的硬體是將雷射光經由括束與光柵產生三條平行光線，再以一入射角投射於待測表面，而反射後的光條紋被投射於屏幕，藉由相機擷取後進行分析處理。關於表面粗糙度的部分，本文提出光斑面積法以及能量分佈法分別對反射後的光斑進行分析，而後進行二種方法的重現性實驗，以驗證所提出方法的量測效能。關於表面輪廓部分，系統先在校準程序中，進行表面因子對光點位置的分析，並建立光點位置與表面參數的關係方程式，隨後分別針對高度、X軸旋轉角以及Y軸旋轉角，進行關係方程式的驗證。而後對實體曲面進行量測。其原理是藉由投射於表面上的三條光線所擷取出九個特徵點位置的變化，推測出先對應的高度值，實驗量測結果與三次元量測儀取得的資料有相當程度的吻合。

Surface quality plays an important role in the product design due to its direct effects on the product appearance. As a result, there is a need to develop a rapid method that can be applied to inspect the surface quality of a product after fabrication processes. In this thesis, a novel on-line optical surface measurement system for both surface roughness and surface profile has been developed. The three-line laser beams are generated by a fringes projector, which consists of a laserdiode, a beam expander and a slit mask. The parallel laser beams were projected onto a specimen with good reflectivity. The reflected fringes on a screen were captured by a CCD camera. By using image-processing algorithm, the information of surface roughness and surface profile can then be determined simultaneously after some calibration processes. For surface roughness estimation, project area method and energy distribution method have been proposed and tested. Surface profile of the test specimen can be evaluated based on the position change of the reflected beams. Experiment results show that a good consistancy was obtained between the optical measurement results and the contact measurement results.

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