本研究將曲面滾動支承應用於隔震系統以及調諧質量阻尼器，由於其回復力與位移呈線性關係，因此具有特定頻率且不會受到上部質量影響，使其作為被動控制元件時，能夠擁有更多的設計彈性與空間優勢。然其水平向位移控制性能仍有改善餘地，前人已提出結合慣質機構以及離合器設計之分析模型與數值模擬結果，經數值分析驗證可有效降低水平向位移需求。
本研究之第一部分，藉由從最單純至前人所提出之機構設計進行性能試驗，成功驗證前人所提出設計概念之可行性，並透過單向簡諧震波試驗結果，觀察到前人提出分析模型之數值模擬結果與實際狀況存在落差。因此，提出更為精確且具實務應用價值之分析模型，以考慮所觀察到的暫態振動行為以及離合器啟動時機延遲現象，並透過試驗與數值模擬結果的比對，以定義之目標函數進一步擬合得到一組參數之分析模型，其在可接受之平均擬合誤差下足以模擬多數的試驗結果。
本研究之第二部分，將曲面滾動支承應用於調諧質量阻尼器進行可行性試驗，並以三種不同設計進行振動台試驗，包括曲面滾動支承、具慣質曲面滾動支承、以及具離合器慣質曲面滾動支承，以縮尺三層樓剪力屋架為結構模型。當考慮調諧質量阻尼器產生離頻效應之境況時，得出結合慣質機構以及離合器設計能夠在較小的空間需求下，同時實現良好的減震效果。利用第一部分提出的分析模型，以數值模擬進行與試驗結果比對，亦獲得不錯的擬合程度，可作為後續研究之重要參考。
本研究之第三部分，針對實際製程機台進行振動台試驗，透過試驗初步了解機台與晶舟的動力特性，並採用各種抗震措施進行保護。由試驗結果得之，以曲面滾動隔震設計保護勁度高且不規則的機台以及易損性高的晶舟，無論有無結合慣質機構與離合器設計，均可有效減少振動反應與破壞潛勢，為後續進一步改進機台耐震性能與制定相應策略提供重要參考。

This study attempts to apply concave rolling-type bearings to passive seismic isolation and tuned mass damper designs. Because of some unique features of the bearings, including linear relation of restoring force and displacement, as well as possessing a constant vibration frequency which is independent of the payload, using the bearings as a passive control device can have more advantages of design flexibility and space utilization. To improve the displacement control performance of the bearings, past relevant studies proposed combinations of the bearings and inerter (or clutch-based inerter). A simple analytical model for the combinations was developed correspondingly and their effectiveness at suppressing displacement was numerically demonstrated in a preliminary manner.
In this study, first, the practical feasibility of the pure bearings and the bearings combined with inerter is experimentally examined. Significant differences between the test results and numerical predictions to unilateral harmonic excitation are observed, which indicates that some unavoidable phenomena in reality may be overlooked in the previously developed analytical model. Therefore, a refined and practical analytical model is proposed, which takes the observations during the tests, including transient response caused by collision and delay time of clutch switch into consideration. Based on an author-defined objective function and using the test results, a set of coefficients for the refined analytical model are determined. The numerical predictions by the refined analytical model, in general, can have an acceptable agreement with the test results.
Second, implementation of the pure bearings, the bearings combined with inerter, and the bearings combined with clutch-based inerter as a tuned mass damper is experimentally examined to protect a scale-down three-story structure model on a shake table. Under the condition of having a detuned effect, the test results indicate that the second and third designs can have better control performance at less expense of space utilization than the first one. Adopting the proposed refined analytical model is also capable of reproducing the test results.
Last, a full-scale facility, inside which a crystal boat is installed, used in the high-tech semiconductor industry is tested on a shake table to further understand its actual dynamic characteristics. In addition, some seismic isolation and energy dissipation strategies, not limited to the pure bearings and the bearings combined with inerter (or clutch-based inerter), are applied. The test results show that whether the inerter mechanism is incorporated or not, applying the bearings can seismically protect such a stiff and irregular facility and such a fragile crystal boat form excessive vibration and damage. The current outcome is helpful to propose some effective and practical strategies to further enhance the seismic performance of relevant facilities and crystal boats.

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